K. Naveen Kumar, G. V. Ashok Reddy, Sheik Abdul Sattar, R. Imran Jafri, R. Premkumar, M. Muthukrishnan, A. Asrar Ahamed, M. R. Meera, Nunna Guru Prakash, Ammar M. Tighezza, Tae Jo Ko
{"title":"氧气流速、退火后温度和不同电解质浓度对通过直流磁控溅射沉积的电致变色用 WO3 薄膜的影响","authors":"K. Naveen Kumar, G. V. Ashok Reddy, Sheik Abdul Sattar, R. Imran Jafri, R. Premkumar, M. Muthukrishnan, A. Asrar Ahamed, M. R. Meera, Nunna Guru Prakash, Ammar M. Tighezza, Tae Jo Ko","doi":"10.1007/s11664-024-11000-4","DOIUrl":null,"url":null,"abstract":"<div><p>In this work, tungsten oxide (WO<sub>3</sub>) films were deposited at room temperature and annealed for 2 h at 400°C. The electrochromic and electrochemical properties were studied for two different electrolytes. The films were deposited at different oxygen flow rates of 2, 4, and 6 standard cubic centimeters per minute (SCCM). X-ray diffraction analysis revealed structural characterization of amorphous and crystalline phases. UV-visible spectroscopy optical transmittance revealed 91% transmittance, and energy-dispersive x-ray spectroscopy (EDS) analysis revealed the absence of impurities and the presence of W and O. An electrochemical analyzer was used to characterize the deposited and annealed WO<sub>3</sub> films immersed in the two different electrolyte solutions (H<sub>2</sub>SO<sub>4</sub> and LiClO<sub>4</sub> with oxygen flow rates ranging from 2 SCCM to 6 SCCM). It was found that the H<sub>2</sub>SO<sub>4</sub> electrolyte of an annealed WO<sub>3</sub> thin film at 2 SCCM demonstrated high coloring efficiency of 50.18 cm<sup>2</sup>/C, and the LiClO<sub>4</sub> electrolyte of an annealed WO<sub>3</sub> thin film at 4 SCCM demonstrated high coloring efficiency of 20.06 cm<sup>2</sup>/C.</p></div>","PeriodicalId":626,"journal":{"name":"Journal of Electronic Materials","volume":"53 5","pages":"2351 - 2366"},"PeriodicalIF":2.2000,"publicationDate":"2024-03-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Effect of Oxygen Flow Rate, Post-annealing Temperature, and Different Electrolyte Concentrations on WO3 Thin Films Deposited by DC Magnetron Sputtering For Electrochromic Applications\",\"authors\":\"K. Naveen Kumar, G. V. Ashok Reddy, Sheik Abdul Sattar, R. Imran Jafri, R. Premkumar, M. Muthukrishnan, A. Asrar Ahamed, M. R. Meera, Nunna Guru Prakash, Ammar M. Tighezza, Tae Jo Ko\",\"doi\":\"10.1007/s11664-024-11000-4\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>In this work, tungsten oxide (WO<sub>3</sub>) films were deposited at room temperature and annealed for 2 h at 400°C. The electrochromic and electrochemical properties were studied for two different electrolytes. The films were deposited at different oxygen flow rates of 2, 4, and 6 standard cubic centimeters per minute (SCCM). X-ray diffraction analysis revealed structural characterization of amorphous and crystalline phases. UV-visible spectroscopy optical transmittance revealed 91% transmittance, and energy-dispersive x-ray spectroscopy (EDS) analysis revealed the absence of impurities and the presence of W and O. An electrochemical analyzer was used to characterize the deposited and annealed WO<sub>3</sub> films immersed in the two different electrolyte solutions (H<sub>2</sub>SO<sub>4</sub> and LiClO<sub>4</sub> with oxygen flow rates ranging from 2 SCCM to 6 SCCM). It was found that the H<sub>2</sub>SO<sub>4</sub> electrolyte of an annealed WO<sub>3</sub> thin film at 2 SCCM demonstrated high coloring efficiency of 50.18 cm<sup>2</sup>/C, and the LiClO<sub>4</sub> electrolyte of an annealed WO<sub>3</sub> thin film at 4 SCCM demonstrated high coloring efficiency of 20.06 cm<sup>2</sup>/C.</p></div>\",\"PeriodicalId\":626,\"journal\":{\"name\":\"Journal of Electronic Materials\",\"volume\":\"53 5\",\"pages\":\"2351 - 2366\"},\"PeriodicalIF\":2.2000,\"publicationDate\":\"2024-03-18\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Electronic Materials\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://link.springer.com/article/10.1007/s11664-024-11000-4\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Electronic Materials","FirstCategoryId":"5","ListUrlMain":"https://link.springer.com/article/10.1007/s11664-024-11000-4","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Effect of Oxygen Flow Rate, Post-annealing Temperature, and Different Electrolyte Concentrations on WO3 Thin Films Deposited by DC Magnetron Sputtering For Electrochromic Applications
In this work, tungsten oxide (WO3) films were deposited at room temperature and annealed for 2 h at 400°C. The electrochromic and electrochemical properties were studied for two different electrolytes. The films were deposited at different oxygen flow rates of 2, 4, and 6 standard cubic centimeters per minute (SCCM). X-ray diffraction analysis revealed structural characterization of amorphous and crystalline phases. UV-visible spectroscopy optical transmittance revealed 91% transmittance, and energy-dispersive x-ray spectroscopy (EDS) analysis revealed the absence of impurities and the presence of W and O. An electrochemical analyzer was used to characterize the deposited and annealed WO3 films immersed in the two different electrolyte solutions (H2SO4 and LiClO4 with oxygen flow rates ranging from 2 SCCM to 6 SCCM). It was found that the H2SO4 electrolyte of an annealed WO3 thin film at 2 SCCM demonstrated high coloring efficiency of 50.18 cm2/C, and the LiClO4 electrolyte of an annealed WO3 thin film at 4 SCCM demonstrated high coloring efficiency of 20.06 cm2/C.
期刊介绍：
The Journal of Electronic Materials (JEM) reports monthly on the science and technology of electronic materials, while examining new applications for semiconductors, magnetic alloys, dielectrics, nanoscale materials, and photonic materials. The journal welcomes articles on methods for preparing and evaluating the chemical, physical, electronic, and optical properties of these materials. Specific areas of interest are materials for state-of-the-art transistors, nanotechnology, electronic packaging, detectors, emitters, metallization, superconductivity, and energy applications.
Review papers on current topics enable individuals in the field of electronics to keep abreast of activities in areas peripheral to their own. JEM also selects papers from conferences such as the Electronic Materials Conference, the U.S. Workshop on the Physics and Chemistry of II-VI Materials, and the International Conference on Thermoelectrics. It benefits both specialists and non-specialists in the electronic materials field.
A journal of The Minerals, Metals & Materials Society.
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