{"title":"用于 EUV 粒子的 Ru 薄膜的红外发射率-电阻率相关性","authors":"Jeongwoon Hwang, Dongwook Kim, Yeonghun Lee, Taesoon Hwang, Jinho Ahn, Kyeongjae Cho","doi":"10.1142/s1793292024500206","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":509426,"journal":{"name":"Nano","volume":"8 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Infrared emissivity - resistivity correlation of Ru thin films for EUV pellicle applications\",\"authors\":\"Jeongwoon Hwang, Dongwook Kim, Yeonghun Lee, Taesoon Hwang, Jinho Ahn, Kyeongjae Cho\",\"doi\":\"10.1142/s1793292024500206\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":509426,\"journal\":{\"name\":\"Nano\",\"volume\":\"8 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-04-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Nano\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1142/s1793292024500206\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nano","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1142/s1793292024500206","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0