{"title":"含电荷空位的氮化铝的弹性和压电性","authors":"Qiaoya Lv, Jian Qiu, Quan Wen","doi":"10.1080/15599612.2024.2332242","DOIUrl":null,"url":null,"abstract":"Wurtzite aluminum nitride (w-AlN) piezoelectric film plays a key role in modern MEMS actuators and sensors. Density functional theory can be used to predict the elastic and piezoelectric properties...","PeriodicalId":50296,"journal":{"name":"International Journal of Optomechatronics","volume":"49 1","pages":""},"PeriodicalIF":6.7000,"publicationDate":"2024-04-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"The elasticity and piezoelectricity of AlN containing charged vacancies\",\"authors\":\"Qiaoya Lv, Jian Qiu, Quan Wen\",\"doi\":\"10.1080/15599612.2024.2332242\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Wurtzite aluminum nitride (w-AlN) piezoelectric film plays a key role in modern MEMS actuators and sensors. Density functional theory can be used to predict the elastic and piezoelectric properties...\",\"PeriodicalId\":50296,\"journal\":{\"name\":\"International Journal of Optomechatronics\",\"volume\":\"49 1\",\"pages\":\"\"},\"PeriodicalIF\":6.7000,\"publicationDate\":\"2024-04-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Journal of Optomechatronics\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://doi.org/10.1080/15599612.2024.2332242\",\"RegionNum\":3,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Journal of Optomechatronics","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1080/15599612.2024.2332242","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
The elasticity and piezoelectricity of AlN containing charged vacancies
Wurtzite aluminum nitride (w-AlN) piezoelectric film plays a key role in modern MEMS actuators and sensors. Density functional theory can be used to predict the elastic and piezoelectric properties...
期刊介绍：
International Journal of Optomechatronics publishes the latest results of multidisciplinary research at the crossroads between optics, mechanics, fluidics and electronics.
Topics you can submit include, but are not limited to:
-Adaptive optics-
Optomechanics-
Machine vision, tracking and control-
Image-based micro-/nano- manipulation-
Control engineering for optomechatronics-
Optical metrology-
Optical sensors and light-based actuators-
Optomechatronics for astronomy and space applications-
Optical-based inspection and fault diagnosis-
Micro-/nano- optomechanical systems (MOEMS)-
Optofluidics-
Optical assembly and packaging-
Optical and vision-based manufacturing, processes, monitoring, and control-
Optomechatronics systems in bio- and medical technologies (such as optical coherence tomography (OCT) systems or endoscopes and optical based medical instruments)
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