锆基块状金属玻璃的阳极溶解行为以及具有高几何精度和良好表面质量的小型结构的电化学加工

Juchen Zhang , Haitao Xu , Yang Liu , Xiaokang Yue , Shunhua Chen
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引用次数: 0

摘要

块状金属玻璃(BMGs)具有优异的机械性能,然而,要加工出高质量的 BMG 结构以广泛应用于工程领域仍是一项挑战。本研究采用电化学加工(ECM)方法加工各种具有高几何精度和表面质量的小型 BMG 结构。首先,研究并讨论了 Zr57Cu20Al10Ni8Ti5 (at.%) BMG 在 NaNO3、H3PO4、NaCl 和 HCl 溶液中的电化学溶解行为。结果表明,在 HCl 和 NaCl 溶液中发生了明显的腐蚀,而在 NaCl 溶液中工件表面的大量副产物和点腐蚀影响了腐蚀的连续性和表面质量。因此,下面的 ECM 过程选择 HCl 溶液作为电解液。其次,研究了加工参数对 BMG 工件 ECM 性能的影响,在电解液为 0.1 mol/L HCl、阴极进给速度为 3 μm/s、加工电压为 10 V、占空比为 15%的情况下,加工性能最佳。最后,获得了粗糙度(Ra)约为 0.2 μm、侧壁锥度小于 2.83°、直径相对误差为 2.1%的小圆孔。通过优化参数,还获得了另一个几何精度和表面质量都很高的正方形结构(0.899 毫米 × 0.891 毫米),这验证了使用 ECM 技术及其优化参数加工小型 BMG 结构的可行性。
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Anodic dissolution behavior of a Zr-based bulk metallic glass and the electrochemical machining of small structures with high geometrical precision and good surface quality

Bulk metallic glasses (BMGs) have excellent mechanical properties, however, it is still challenging to process high-qualtiy BMG structures for their widespread engineering applications. In this work, electrochemical machining (ECM) is adopted to process various small BMG structures with high geometrical precision and surface quality. Firstly, the electrochemical dissolution behavior of a Zr57Cu20Al10Ni8Ti5 (at.%) BMG in NaNO3, H3PO4, NaCl, and HCl solutions was investigated and discussed. The results shown that obvious corrosion occurred in HCl and NaCl solutions, while mass by-products and pitting corrosion on the workpiece surface in NaCl solution affect the corrosion continuity and surface quality. Therefore, the HCl solution is selected as the electrolyte for the following ECM process. Secondly, the effects of machining parameters on the ECM performance of BMG workpieces were investigated, where the optimal machining performance was achieved with an electrolyte of 0.1 mol/L HCl, a cathode feed rate of 3 μm/s, a machining voltage of 10 V, and a duty cycle of 15%. Finally, a small round hole with a roughness (Ra) of about 0.2 μm, a sidewall taper of less than 2.83°, and a relative error of diameters of 2.1% was obtained. Another square structure (0.899 mm × 0.891 mm) with high geometrical precision and surface quality was also achieved by the optimal parameters, which validates the feasibility to machine small BMG structures using the ECM technique with its optimal parameters.

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来源期刊
CiteScore
7.40
自引率
5.60%
发文量
177
审稿时长
46 days
期刊介绍: Precision Engineering - Journal of the International Societies for Precision Engineering and Nanotechnology is devoted to the multidisciplinary study and practice of high accuracy engineering, metrology, and manufacturing. The journal takes an integrated approach to all subjects related to research, design, manufacture, performance validation, and application of high precision machines, instruments, and components, including fundamental and applied research and development in manufacturing processes, fabrication technology, and advanced measurement science. The scope includes precision-engineered systems and supporting metrology over the full range of length scales, from atom-based nanotechnology and advanced lithographic technology to large-scale systems, including optical and radio telescopes and macrometrology.
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