{"title":"用于校正磁控管源离子束的静电透镜","authors":"A. A. Terent’ev","doi":"10.1134/S0020441224700556","DOIUrl":null,"url":null,"abstract":"<p>The schematic diagram and design of an electrostatic lens for correction and additional focusing of a beam coming out of a magnetron-type ion source are described. A drawing of such a lens is presented.</p>","PeriodicalId":587,"journal":{"name":"Instruments and Experimental Techniques","volume":"67 2","pages":"295 - 297"},"PeriodicalIF":0.4000,"publicationDate":"2024-07-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"An Electrostatic Lens for Correcting the Ion Beam of a Magnetron Source\",\"authors\":\"A. A. Terent’ev\",\"doi\":\"10.1134/S0020441224700556\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p>The schematic diagram and design of an electrostatic lens for correction and additional focusing of a beam coming out of a magnetron-type ion source are described. A drawing of such a lens is presented.</p>\",\"PeriodicalId\":587,\"journal\":{\"name\":\"Instruments and Experimental Techniques\",\"volume\":\"67 2\",\"pages\":\"295 - 297\"},\"PeriodicalIF\":0.4000,\"publicationDate\":\"2024-07-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Instruments and Experimental Techniques\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://link.springer.com/article/10.1134/S0020441224700556\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"ENGINEERING, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Instruments and Experimental Techniques","FirstCategoryId":"5","ListUrlMain":"https://link.springer.com/article/10.1134/S0020441224700556","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"ENGINEERING, MULTIDISCIPLINARY","Score":null,"Total":0}
An Electrostatic Lens for Correcting the Ion Beam of a Magnetron Source
The schematic diagram and design of an electrostatic lens for correction and additional focusing of a beam coming out of a magnetron-type ion source are described. A drawing of such a lens is presented.
期刊介绍：
Instruments and Experimental Techniques is an international peer reviewed journal that publishes reviews describing advanced methods for physical measurements and techniques and original articles that present techniques for physical measurements, principles of operation, design, methods of application, and analysis of the operation of physical instruments used in all fields of experimental physics and when conducting measurements using physical methods and instruments in astronomy, natural sciences, chemistry, biology, medicine, and ecology.
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