基于 CMOS 太赫兹探测器的焦平面成像系统

Yue Lin, Hui Zhang, Feng Qi, Zhaoyang Liu, Guanwen Wang, Ningbo Wang
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摘要

太赫兹技术具有穿透能力强、非电离、瞬时带宽高等优势,在成像领域的应用潜力巨大。本文介绍了一种基于 CMOS 太赫兹探测器的焦平面成像系统,用于前瞻性探测。该焦平面成像系统具有扫描速度快、组成简单、成本低、易于集成 CMOS 探测器等优点。它由一个太赫兹辐射源、一个聚四氟乙烯(PTFE)透镜和一个宽带 CMOS 探测器组成。探测器采用 65 纳米 CMOS 工艺制造。探测器的工作频率范围为 75 GHz 至 1000 GHz。测量结果表明,焦平面成像系统能够在 100 GHz 和 220 GHz 的频率下稳定成像。为了解决测量图像中信息缺失的问题,采用了形态学闭合算法来处理原始图像,成功地填补了缺失信息,提高了图像质量。
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Focal plane imaging system based on CMOS terahertz detector
Terahertz technology has shown remarkable potential for application in the field of imaging since it offers several particular advantages such as great penetration capabilities, non-ionization and high instantaneous bandwidth. This paper presents a focal plane imging system based on CMOS terathertz detector for forward-looking detection. The focal plane imaging system has several advantages, including fast scanning, simple composition, low cost, and easy integration of a CMOS detector. It is composed of a terahertz radiation source, a Polytetrafluoroethylene (PTFE) lens and a broadband CMOS detector. The detector was fabricated in a 65 nm CMOS process. The operating frequency range of the detector covers 75 GHz to 1000 GHz. Measurement results have shown that the focal plane imaging system is capable of stably imaging at frequencies of 100 GHz and 220 GHz. To address the issue of missing information in measurement images, the morphological closing algorithm is employed to process the original image, successfully filling in the missing information and improving image quality.
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