环形磁化系统中微波和射频放电的等离子体参数和中性粒子的特征。

IF 16.4 1区化学 Q1 CHEMISTRY, MULTIDISCIPLINARY Accounts of Chemical Research Pub Date : 2024-08-01 DOI:10.1063/5.0219487

D López-Rodríguez, K Crombé, A Goriaev, J Buermans, A Adriaens, Yu Kovtun, L Dittrich, P Petersson, T Wauters, S Brezinsek

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引用次数: 0

摘要

对环形磁化系统（TOMAS）中的射频和微波放电进行了等离子体参数以及中性粒子能量和通量表征。使用可移动的三重朗缪尔探针研究电子密度和温度，并使用飞行时间中性粒子分析仪测量中性粒子的能量和通量，这是总注入功率和用于产生等离子体的天线频率的函数。实验结果可提供有关壁调节等离子体中低能量中性粒子行为的信息。

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Characterization of plasma parameters and neutral particles in microwave and radio frequency discharges in the Toroidal Magnetized System.

A characterization of plasma parameters and neutral particle energies and fluxes has been performed for radio frequency and microwave discharges in the Toroidal Magnetized System (TOMAS). A movable triple Langmuir probe was used to study the electron densities and temperatures, and a time-of-flight neutral particle analyzer was used to measure the energy and fluxes of neutral particles, as a function of the total injected power and the antenna frequency used to generate the plasma. The experimental results can provide information on the behavior of neutral particles at low energies in wall conditioning plasmas.

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来源期刊

Accounts of Chemical Research 化学-化学综合

CiteScore

31.40

自引率

1.10%

发文量

312

审稿时长

2 months

期刊介绍： Accounts of Chemical Research presents short, concise and critical articles offering easy-to-read overviews of basic research and applications in all areas of chemistry and biochemistry. These short reviews focus on research from the author’s own laboratory and are designed to teach the reader about a research project. In addition, Accounts of Chemical Research publishes commentaries that give an informed opinion on a current research problem. Special Issues online are devoted to a single topic of unusual activity and significance. Accounts of Chemical Research replaces the traditional article abstract with an article "Conspectus." These entries synopsize the research affording the reader a closer look at the content and significance of an article. Through this provision of a more detailed description of the article contents, the Conspectus enhances the article's discoverability by search engines and the exposure for the research.