无载波包络偏移锁定的高精度短距离双梳状测距系统

IF 3.2 2区 物理与天体物理 Q2 OPTICS Optics express Pub Date : 2024-08-30 DOI:10.1364/oe.535020
Yuetang Yang, Shan Qian, Siyu Zhou, Guanhao Wu
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引用次数: 0

摘要

本文提出了一种用于短距离测量的高精度双梳状测距(DCR)方法,避免了载波包络偏移锁定。该方法引入了交叉偏振检测,能更好地利用短距离干涉图对的内在相干性。我们分析了 DCR 系统中的噪声,并提出了一种基于中心点提取的载波相位差(CPD)计算算法。CPD 的标准偏差比我们在以前的工作中提出的方法小八倍,在 10 µm 的距离上动态距离分辨率小于 10 nm。此外,我们还将 DCR 结果与 0 至 4.8 mm 的氦氖激光干涉仪进行了比较,发现残差小于 ±40 nm。
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High-precision short-distance dual-comb ranging system without carrier-envelope-offset locking
In this paper, we propose a high-precision dual-comb ranging (DCR) method for short-distance measurement, avoiding carrier-envelope-offset locking. Cross-polarization detection is introduced, which makes better use of the intrinsic coherence of interferogram pairs over a short distance. We analyze the noise in the DCR system and propose a carrier-wave phase difference (CPD) calculation algorithm based on centroid extraction. The standard deviation of CPD is eight times less than that of the method we had proposed in a previous work, and the dynamic distance resolution is less than 10 nm at a distance of 10 µm. Besides, we compare the DCR result with the He-Ne laser interferometer from 0 to 4.8 mm, and the residual is found to be less than ±40 nm.
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来源期刊
Optics express
Optics express 物理-光学
CiteScore
6.60
自引率
15.80%
发文量
5182
审稿时长
2.1 months
期刊介绍: Optics Express is the all-electronic, open access journal for optics providing rapid publication for peer-reviewed articles that emphasize scientific and technology innovations in all aspects of optics and photonics.
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