碳化硅外延层的核扫描微探针分析

IF 0.48 Q4 Physics and Astronomy Bulletin of the Russian Academy of Sciences: Physics Pub Date : 2024-08-28 DOI:10.1134/S1062873824707463

M. E. Buzoverya, I. A. Karpov, A. Yu. Arkhipov, D. A. Skvortsov, V. A. Neverov, B. F. Mamin

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引用次数: 0

摘要

摘要在卢瑟福反向散射模式下，使用核扫描显微探针对同向外延 4H-SiC 层的表面进行了研究。对样品表面状态和合成条件的分析表明，一些样品上层硅（Si）含量的增加先于高缺陷 4H-SiC 层的形成。

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Nuclear Scanning Microprobe Analysis of Silicon Carbide Epilayers

The surfaces of homoepitaxial 4H-SiC layers were studied using a nuclear scanning microprobe in the Rutherford backscattering mode. Analysis of the state of the sample surfaces and the synthesis conditions showed that an increase in the silicon (Si) content in the upper layers of some samples precedes the formation of highly defective 4H-SiC layers.

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来源期刊

Bulletin of the Russian Academy of Sciences: Physics Physics and Astronomy-Physics and Astronomy (all)

CiteScore

0.90

自引率

0.00%

发文量

251

期刊介绍： Bulletin of the Russian Academy of Sciences: Physics is an international peer reviewed journal published with the participation of the Russian Academy of Sciences. It presents full-text articles (regular, letters to the editor, reviews) with the most recent results in miscellaneous fields of physics and astronomy: nuclear physics, cosmic rays, condensed matter physics, plasma physics, optics and photonics, nanotechnologies, solar and astrophysics, physical applications in material sciences, life sciences, etc. Bulletin of the Russian Academy of Sciences: Physics focuses on the most relevant multidisciplinary topics in natural sciences, both fundamental and applied. Manuscripts can be submitted in Russian and English languages and are subject to peer review. Accepted articles are usually combined in thematic issues on certain topics according to the journal editorial policy. Authors featured in the journal represent renowned scientific laboratories and institutes from different countries, including large international collaborations. There are globally recognized researchers among the authors: Nobel laureates and recipients of other awards, and members of national academies of sciences and international scientific societies.