Flux-Controlled Hybrid Reluctance Pinch Valve Using Magnetoelectric Sensing

A hybrid magnetic reluctance pinch valve (HRPV) has been developed to achieve precise control over flow outputs, utilizing a magnetic flux regulation scheme. This system incorporates magnetostrictive piezoelectric composite materials embedded within the primary magnetic circuit, which, coupled with a magnetoelectric effect (ME)-based sensing mechanism, enables the precise detection of magnetic flux variations. The system is highly sensitive to magnetic fields and capable of accurately monitoring both static and dynamic changes in magnetic flux. By adjusting the air gap in parallel with the magnetoelectric materials in the main magnetic circuit, the range of magnetic flux detected by the sensor can be modulated, enhancing the resolution of the sensor at the output end. In trajectory tracking experiments, the proportional-integral-derivative (PID) controller, combined with feedforward compensation for flux feedback, demonstrated excellent robustness and precision in regulating flow rates. The valve precisely tracked a 100 $\boldsymbol{\mu}$m sinusoidal trajectory with a tracking error of 39.24 nm and a 20 $\boldsymbol{\mu}$m trapezoidal trajectory with a tracking error of 10.16 nm. These corresponded to volumetric flow rate errors of 20 and 1 $\boldsymbol{\mu}$L, respectively.