{"title":"氧添加对TiSiN涂层组织、力学和热性能的影响","authors":"Huan W. Zhu , Jian W. Du , Jie Zhang , Li Chen","doi":"10.1016/j.vacuum.2025.114131","DOIUrl":null,"url":null,"abstract":"<div><div>In this study, the effect of oxygen content on the structure and properties of (Ti<sub>1-x</sub>Si<sub>x</sub>)(O<sub>y</sub>N<sub>1-y</sub>)<sub>z</sub> coating is investigated. In (Ti<sub>1-x</sub>Si<sub>x</sub>)(O<sub>y</sub>N<sub>1-y</sub>)<sub>z</sub> coatings, oxygen substitutes nitrogen atoms in TiSiN, forming a single-phase cubic solid solution structure. A small amount of oxygen addition has slight effect on the compressive stress of the coating from −8.35 ± 0.05 GPa for Ti<sub>0.83</sub>Si<sub>0.17</sub>N<sub>1.02</sub> to −8.61 ± 0.02 GPa for (Ti<sub>0.83</sub>Si<sub>0.17</sub>)(O<sub>0.10</sub>N<sub>0.90</sub>)<sub>1.28</sub>, while further increasing oxygen leads to a drop in the compressive stress to −7.76 ± 0.05 GPa for (Ti<sub>0.82</sub>Si<sub>0.18</sub>)(O<sub>0.21</sub>N<sub>0.79</sub>)<sub>1.44</sub> and −4.55 ± 0.01 GPa for (Ti<sub>0.82</sub>Si<sub>0.18</sub>)(O<sub>0.52</sub>N<sub>0.48</sub>)<sub>1.71</sub>. The hardness of Ti<sub>0.83</sub>Si<sub>0.17</sub>N<sub>1.02</sub>, (Ti<sub>0.83</sub>Si<sub>0.17</sub>)(O<sub>0.10</sub>N<sub>0.90</sub>)<sub>1.28</sub>, (Ti<sub>0.82</sub>Si<sub>0.18</sub>)(O<sub>0.21</sub>N<sub>0.79</sub>)<sub>1.44</sub> and (Ti<sub>0.82</sub>Si<sub>0.18</sub>)(O<sub>0.52</sub>N<sub>0.48</sub>)<sub>1.71</sub> coatings are 39.5 ± 0.9, 38.1 ± 0.6, 36.9 ± 1.0 and 30.5 ± 0.9 GPa, respectively, which can be maintained up to ∼ 1100 °C due to the suppressed grain growth. However, the addition of oxygen reduces the oxidation resistance of TiSiN coatings.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"235 ","pages":"Article 114131"},"PeriodicalIF":3.9000,"publicationDate":"2025-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Influence of oxygen addition on the structure, mechanical and thermal properties of TiSiN coating\",\"authors\":\"Huan W. Zhu , Jian W. Du , Jie Zhang , Li Chen\",\"doi\":\"10.1016/j.vacuum.2025.114131\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>In this study, the effect of oxygen content on the structure and properties of (Ti<sub>1-x</sub>Si<sub>x</sub>)(O<sub>y</sub>N<sub>1-y</sub>)<sub>z</sub> coating is investigated. In (Ti<sub>1-x</sub>Si<sub>x</sub>)(O<sub>y</sub>N<sub>1-y</sub>)<sub>z</sub> coatings, oxygen substitutes nitrogen atoms in TiSiN, forming a single-phase cubic solid solution structure. A small amount of oxygen addition has slight effect on the compressive stress of the coating from −8.35 ± 0.05 GPa for Ti<sub>0.83</sub>Si<sub>0.17</sub>N<sub>1.02</sub> to −8.61 ± 0.02 GPa for (Ti<sub>0.83</sub>Si<sub>0.17</sub>)(O<sub>0.10</sub>N<sub>0.90</sub>)<sub>1.28</sub>, while further increasing oxygen leads to a drop in the compressive stress to −7.76 ± 0.05 GPa for (Ti<sub>0.82</sub>Si<sub>0.18</sub>)(O<sub>0.21</sub>N<sub>0.79</sub>)<sub>1.44</sub> and −4.55 ± 0.01 GPa for (Ti<sub>0.82</sub>Si<sub>0.18</sub>)(O<sub>0.52</sub>N<sub>0.48</sub>)<sub>1.71</sub>. The hardness of Ti<sub>0.83</sub>Si<sub>0.17</sub>N<sub>1.02</sub>, (Ti<sub>0.83</sub>Si<sub>0.17</sub>)(O<sub>0.10</sub>N<sub>0.90</sub>)<sub>1.28</sub>, (Ti<sub>0.82</sub>Si<sub>0.18</sub>)(O<sub>0.21</sub>N<sub>0.79</sub>)<sub>1.44</sub> and (Ti<sub>0.82</sub>Si<sub>0.18</sub>)(O<sub>0.52</sub>N<sub>0.48</sub>)<sub>1.71</sub> coatings are 39.5 ± 0.9, 38.1 ± 0.6, 36.9 ± 1.0 and 30.5 ± 0.9 GPa, respectively, which can be maintained up to ∼ 1100 °C due to the suppressed grain growth. However, the addition of oxygen reduces the oxidation resistance of TiSiN coatings.</div></div>\",\"PeriodicalId\":23559,\"journal\":{\"name\":\"Vacuum\",\"volume\":\"235 \",\"pages\":\"Article 114131\"},\"PeriodicalIF\":3.9000,\"publicationDate\":\"2025-05-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Vacuum\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0042207X25001216\",\"RegionNum\":2,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"2025/2/13 0:00:00\",\"PubModel\":\"Epub\",\"JCR\":\"Q2\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Vacuum","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0042207X25001216","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"2025/2/13 0:00:00","PubModel":"Epub","JCR":"Q2","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
Influence of oxygen addition on the structure, mechanical and thermal properties of TiSiN coating
In this study, the effect of oxygen content on the structure and properties of (Ti1-xSix)(OyN1-y)z coating is investigated. In (Ti1-xSix)(OyN1-y)z coatings, oxygen substitutes nitrogen atoms in TiSiN, forming a single-phase cubic solid solution structure. A small amount of oxygen addition has slight effect on the compressive stress of the coating from −8.35 ± 0.05 GPa for Ti0.83Si0.17N1.02 to −8.61 ± 0.02 GPa for (Ti0.83Si0.17)(O0.10N0.90)1.28, while further increasing oxygen leads to a drop in the compressive stress to −7.76 ± 0.05 GPa for (Ti0.82Si0.18)(O0.21N0.79)1.44 and −4.55 ± 0.01 GPa for (Ti0.82Si0.18)(O0.52N0.48)1.71. The hardness of Ti0.83Si0.17N1.02, (Ti0.83Si0.17)(O0.10N0.90)1.28, (Ti0.82Si0.18)(O0.21N0.79)1.44 and (Ti0.82Si0.18)(O0.52N0.48)1.71 coatings are 39.5 ± 0.9, 38.1 ± 0.6, 36.9 ± 1.0 and 30.5 ± 0.9 GPa, respectively, which can be maintained up to ∼ 1100 °C due to the suppressed grain growth. However, the addition of oxygen reduces the oxidation resistance of TiSiN coatings.
期刊介绍：
Vacuum is an international rapid publications journal with a focus on short communication. All papers are peer-reviewed, with the review process for short communication geared towards very fast turnaround times. The journal also published full research papers, thematic issues and selected papers from leading conferences.
A report in Vacuum should represent a major advance in an area that involves a controlled environment at pressures of one atmosphere or below.
The scope of the journal includes:
1. Vacuum; original developments in vacuum pumping and instrumentation, vacuum measurement, vacuum gas dynamics, gas-surface interactions, surface treatment for UHV applications and low outgassing, vacuum melting, sintering, and vacuum metrology. Technology and solutions for large-scale facilities (e.g., particle accelerators and fusion devices). New instrumentation ( e.g., detectors and electron microscopes).
2. Plasma science; advances in PVD, CVD, plasma-assisted CVD, ion sources, deposition processes and analysis.
3. Surface science; surface engineering, surface chemistry, surface analysis, crystal growth, ion-surface interactions and etching, nanometer-scale processing, surface modification.
4. Materials science; novel functional or structural materials. Metals, ceramics, and polymers. Experiments, simulations, and modelling for understanding structure-property relationships. Thin films and coatings. Nanostructures and ion implantation.
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