Lexiang Yin , Chenyang Wang , Pei Li , Fanping Meng , Ping Zhu , Feng Huang , Fangfang Ge , Xuewen Xu , Peng Li
{"title":"高沉积速率溅射Al·Al2O3纳米复合涂层的自愈行为及其抗腐蚀性能","authors":"Lexiang Yin , Chenyang Wang , Pei Li , Fanping Meng , Ping Zhu , Feng Huang , Fangfang Ge , Xuewen Xu , Peng Li","doi":"10.1016/j.vacuum.2025.114134","DOIUrl":null,"url":null,"abstract":"<div><div>PVD coatings have limitations as corrosion-resistant coatings mainly because the rapid condensation resulting in insufficient atoms diffusion during the vapor deposition process leads to non-dense coating growth, preventing the coating from completely isolating corrosive agents. The mid-frequency Al target magnetron reactive sputtering method, by precisely controlling the O<sub>2</sub> flow rate, has produced a nanocomposite coating consisting of nano-Al and amorphous Al<sub>2</sub>O<sub>3</sub>. During the corrosion process, the nano-Al gradually oxidizes, filling the pinholes, thus providing a self-healing effect that completely isolates the corrosive agents. This results in the coating exhibiting significantly improved corrosion resistance, enhancing the corrosion resistance by 10 orders of magnitude compared to 304 stainless steels.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"235 ","pages":"Article 114134"},"PeriodicalIF":3.9000,"publicationDate":"2025-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Self-healing behavior in high-deposition-rate sputtered Al·Al2O3 nanocomposite coatings for enhanced corrosion resistance\",\"authors\":\"Lexiang Yin , Chenyang Wang , Pei Li , Fanping Meng , Ping Zhu , Feng Huang , Fangfang Ge , Xuewen Xu , Peng Li\",\"doi\":\"10.1016/j.vacuum.2025.114134\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>PVD coatings have limitations as corrosion-resistant coatings mainly because the rapid condensation resulting in insufficient atoms diffusion during the vapor deposition process leads to non-dense coating growth, preventing the coating from completely isolating corrosive agents. The mid-frequency Al target magnetron reactive sputtering method, by precisely controlling the O<sub>2</sub> flow rate, has produced a nanocomposite coating consisting of nano-Al and amorphous Al<sub>2</sub>O<sub>3</sub>. During the corrosion process, the nano-Al gradually oxidizes, filling the pinholes, thus providing a self-healing effect that completely isolates the corrosive agents. This results in the coating exhibiting significantly improved corrosion resistance, enhancing the corrosion resistance by 10 orders of magnitude compared to 304 stainless steels.</div></div>\",\"PeriodicalId\":23559,\"journal\":{\"name\":\"Vacuum\",\"volume\":\"235 \",\"pages\":\"Article 114134\"},\"PeriodicalIF\":3.9000,\"publicationDate\":\"2025-05-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Vacuum\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0042207X25001241\",\"RegionNum\":2,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"2025/2/18 0:00:00\",\"PubModel\":\"Epub\",\"JCR\":\"Q2\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Vacuum","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0042207X25001241","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"2025/2/18 0:00:00","PubModel":"Epub","JCR":"Q2","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
Self-healing behavior in high-deposition-rate sputtered Al·Al2O3 nanocomposite coatings for enhanced corrosion resistance
PVD coatings have limitations as corrosion-resistant coatings mainly because the rapid condensation resulting in insufficient atoms diffusion during the vapor deposition process leads to non-dense coating growth, preventing the coating from completely isolating corrosive agents. The mid-frequency Al target magnetron reactive sputtering method, by precisely controlling the O2 flow rate, has produced a nanocomposite coating consisting of nano-Al and amorphous Al2O3. During the corrosion process, the nano-Al gradually oxidizes, filling the pinholes, thus providing a self-healing effect that completely isolates the corrosive agents. This results in the coating exhibiting significantly improved corrosion resistance, enhancing the corrosion resistance by 10 orders of magnitude compared to 304 stainless steels.
期刊介绍：
Vacuum is an international rapid publications journal with a focus on short communication. All papers are peer-reviewed, with the review process for short communication geared towards very fast turnaround times. The journal also published full research papers, thematic issues and selected papers from leading conferences.
A report in Vacuum should represent a major advance in an area that involves a controlled environment at pressures of one atmosphere or below.
The scope of the journal includes:
1. Vacuum; original developments in vacuum pumping and instrumentation, vacuum measurement, vacuum gas dynamics, gas-surface interactions, surface treatment for UHV applications and low outgassing, vacuum melting, sintering, and vacuum metrology. Technology and solutions for large-scale facilities (e.g., particle accelerators and fusion devices). New instrumentation ( e.g., detectors and electron microscopes).
2. Plasma science; advances in PVD, CVD, plasma-assisted CVD, ion sources, deposition processes and analysis.
3. Surface science; surface engineering, surface chemistry, surface analysis, crystal growth, ion-surface interactions and etching, nanometer-scale processing, surface modification.
4. Materials science; novel functional or structural materials. Metals, ceramics, and polymers. Experiments, simulations, and modelling for understanding structure-property relationships. Thin films and coatings. Nanostructures and ion implantation.
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