用等离子体聚焦装置研究脉冲碳氢离子辐照在不同基底材料上形成的类金刚石碳涂层

IF 1.3 Q3 ORTHOPEDICS Plasma Research Express Pub Date : 2021-04-28 DOI:10.1088/2516-1067/abf948
R. Niranjan, J. Joycee, R. Srivastava, N. Patel, K. Joshi
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引用次数: 1

摘要

利用等离子体聚焦装置中产生的脉冲碳氢离子照射不同的衬底材料(Si、Ti、Mo和W)并在其上沉积碳材料薄膜。当等离子体聚焦装置充满0.5毫巴的乙炔气并在2 kJ下工作时,产生了高能和高强度的脉冲碳氢化合物离子。研究了衬底材料的性质、在高能离子和等离子体流的脉冲辐照下的热演化对沉积薄膜的影响。可见拉曼光谱测量证实沉积的薄膜是类金刚石的碳。发现在不同衬底材料上的膜中sp3键合碳的比例(在Si、Ti、Mo和W上分别为16%、8.7%、13%和18.9%)与衬底材料的热性能相关,即在具有高导热性的衬底材料上观察到高比例的sp3键结碳。在不同的衬底上测得碳原子浓度不同(Si、Ti、Mo和W上分别为22.46原子%、22.7原子%、10.4原子%和32原子%)。还观察到DLC的表面形态对于不同的基底是不同的。在阳极尖端插入石墨后,硅衬底上DLC涂层中sp3键合碳的比例增加到19.5%。
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Study of diamond like carbon coatings formed by pulsed hydrocarbon ions irradiations over different substrate materials using plasma focus device
Pulsed hydrocarbon ions produced in a plasma focus device were used to irradiate different substrate materials (Si, Ti, Mo and W) and to deposit thin films of carbon material over it. High energetic and high intensity pulsed hydrocarbon ions were produced when plasma focus device was filled with 0.5 mbar of acetylene gas and operated at 2 kJ. Effects of substrate materials properties, its thermal evolution under pulsed irradiation of energetic ions and plasma streams on the deposited films have been studied. Visible Raman spectroscopic measurements confirmed that deposited films were of diamond-like-carbon. Fraction of sp3 bonded carbon in films on different substrate materials (16%, 8.7%, 13% and 18.9% on Si, Ti, Mo and W respectively) was found to be correlated to substrate materials thermal properties i.e. high fraction of sp3 bonded carbon was observed over substrate materials having high thermal conductivity. Carbon atom concentrations were measured to be different (22.46 at. %, 22.7 at. %, 10.4 at. % and 32 at. % on Si, Ti, Mo and W respectively) over different substrates. Surface morphologies of DLC were also observed to be different for different substrates. On inserting graphite at anode tip, fraction of sp3 bonded carbon in DLC coating over Si substrate increased to 19.5%.
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来源期刊
Plasma Research Express
Plasma Research Express Energy-Nuclear Energy and Engineering
CiteScore
2.60
自引率
0.00%
发文量
15
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