无机硫系抗蚀剂全息记录的分辨能力

{"title":"无机硫系抗蚀剂全息记录的分辨能力","authors":"M. Mikhailov, A. Belykh, I. Y. Yusupov","doi":"10.1364/jot.90.000107","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":16597,"journal":{"name":"Journal of Optical Technology","volume":" ","pages":""},"PeriodicalIF":0.5000,"publicationDate":"2023-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Resolution ability of inorganic chalcogenide resists for hologram recording\",\"authors\":\"M. Mikhailov, A. Belykh, I. Y. Yusupov\",\"doi\":\"10.1364/jot.90.000107\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":16597,\"journal\":{\"name\":\"Journal of Optical Technology\",\"volume\":\" \",\"pages\":\"\"},\"PeriodicalIF\":0.5000,\"publicationDate\":\"2023-03-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Optical Technology\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://doi.org/10.1364/jot.90.000107\",\"RegionNum\":4,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"OPTICS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Optical Technology","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1364/jot.90.000107","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"OPTICS","Score":null,"Total":0}