{"title":"环境温度对原子力显微镜尺寸测量的影响","authors":"Chengfu Ma, Yuhang Chen, Wenhao Huang","doi":"10.1063/10.0003939","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":35428,"journal":{"name":"Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering","volume":"4 1","pages":"023003"},"PeriodicalIF":3.5000,"publicationDate":"2021-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1063/10.0003939","citationCount":"1","resultStr":"{\"title\":\"Environmental temperature effect on dimensional measurements of atomic force microscopy\",\"authors\":\"Chengfu Ma, Yuhang Chen, Wenhao Huang\",\"doi\":\"10.1063/10.0003939\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":35428,\"journal\":{\"name\":\"Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering\",\"volume\":\"4 1\",\"pages\":\"023003\"},\"PeriodicalIF\":3.5000,\"publicationDate\":\"2021-06-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1063/10.0003939\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering\",\"FirstCategoryId\":\"1087\",\"ListUrlMain\":\"https://doi.org/10.1063/10.0003939\",\"RegionNum\":3,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering","FirstCategoryId":"1087","ListUrlMain":"https://doi.org/10.1063/10.0003939","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 1