尘埃等离子体:从土星环到半导体处理设备

IF 7.7 2区 物理与天体物理 Q1 PHYSICS, MULTIDISCIPLINARY Advances in Physics: X Pub Date : 2021-01-01 DOI:10.1080/23746149.2021.1873859
R. Merlino
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引用次数: 18

摘要

摘要尘埃等离子体是指含有尺寸在10纳米-10微米之间的固体颗粒的等离子体。粒子通过从等离子体中收集电子和离子来获得电荷,或者如果暴露在紫外线辐射下,则通过光电子发射来获得电荷。带电尘埃粒子与电子和离子相互作用,形成多组分等离子体。尘埃等离子体出现在许多自然环境中,包括行星环、彗星尾和太阳星云;以及用于制造半导体芯片的技术装置和磁聚变装置。这篇文章的重点是尘埃等离子体的物理基础,等离子体物理学家、航空学家、空间物理学家和天体物理学家都在研究尘埃等离子体。这篇文章首先介绍了我们所说的尘埃等离子体的含义,它们是在哪里发现的,并总结了它们的基本性质。然后,文章介绍了尘埃带电的基本物理、尘埃粒子上的力、用于产生尘埃等离子体的设备的描述、强耦合尘埃等离子体、尘埃等离子体中的集体现象(波)、磁化尘埃等离子体以及基于尘埃等离子体的新兴技术。最后,对该领域的历史发展和未来发展前景进行了一些前瞻性评论。图形摘要
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Dusty plasmas: from Saturn’s rings to semiconductor processing devices
ABSTRACT Dusty plasmas are plasmas containing solid particles in the size range of about 10 nm—10 μm. The particles acquire an electrical charge by collecting electrons and ions from the plasma, or by photo-electron emission if they are exposed to UV radiation. The charged dust particles interact with the electrons and ions, forming a multi-component plasma. Dusty plasmas occur in a number of natural environments, including planetary rings, comet tails, and solar nebulae; as well as in technological devices used to manufacture semiconductor chips, and in magnetic fusion devices. This article focuses on the physics underlying dusty plasmas, which are studied by plasma physicists, aeronomists, space physicists, and astrophysicists. The article begins with an introduction explaining what we mean by a dusty plasma, where they are found, and a summary of their basic properties. The article then presents the fundamental physics of dust charging, forces on dust particles, a description of devices used to produce dusty plasmas, strongly coupled dusty plasmas, collective phenomenon (waves) in dusty plasmas, magnetized dusty plasmas, and the emerging technologies based on dusty plasmas. It concludes with a few perspective comments on how the field has developed historically and the prospects for future advances. Graphical abstract
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来源期刊
Advances in Physics: X
Advances in Physics: X Physics and Astronomy-General Physics and Astronomy
CiteScore
13.60
自引率
0.00%
发文量
37
审稿时长
13 weeks
期刊介绍: Advances in Physics: X is a fully open-access journal that promotes the centrality of physics and physical measurement to modern science and technology. Advances in Physics: X aims to demonstrate the interconnectivity of physics, meaning the intellectual relationships that exist between one branch of physics and another, as well as the influence of physics across (hence the “X”) traditional boundaries into other disciplines including: Chemistry Materials Science Engineering Biology Medicine
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