{"title":"用射频等离子体增强CVD制备含氟烷基的透明拒水膜","authors":"A. Hozumi, H. Sekoguchi, N. Sugimoto, O. Takai","doi":"10.1080/00202967.1998.11871194","DOIUrl":null,"url":null,"abstract":"SummaryTransparent water-repellent films containing fluoro-alkyl functions were prepared on polycarbonate, glass and Si substrates by rf plasma-enhanced CVD. The vapours of the fluoro-alkyl silanes were used as raw materials. The substrate temperature during deposition was around 50°C. The films obtained had good water repellency. The maximum contact angle for a water drop was 107 degrees. The contact angles obtained depended on the number of—(CF2)—in FAS molecules. FTIR and XPS were used to investigate the film properties. The existence of the fluoro-alkyl functions CP3—,—CF2—and >CF—was confirmed at the film surfaces. The transmittance of the PC substrate was improved by the coating. These films also have a function as anti-reflective coatings.","PeriodicalId":23268,"journal":{"name":"Transactions of The Institute of Metal Finishing","volume":"76 1","pages":"51-53"},"PeriodicalIF":1.2000,"publicationDate":"1998-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1080/00202967.1998.11871194","citationCount":"2","resultStr":"{\"title\":\"Transparent Water-repellent Films Containing Fluoro-alkyl Functions by RF Plasma-enhanced CVD\",\"authors\":\"A. Hozumi, H. Sekoguchi, N. Sugimoto, O. Takai\",\"doi\":\"10.1080/00202967.1998.11871194\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"SummaryTransparent water-repellent films containing fluoro-alkyl functions were prepared on polycarbonate, glass and Si substrates by rf plasma-enhanced CVD. The vapours of the fluoro-alkyl silanes were used as raw materials. The substrate temperature during deposition was around 50°C. The films obtained had good water repellency. The maximum contact angle for a water drop was 107 degrees. The contact angles obtained depended on the number of—(CF2)—in FAS molecules. FTIR and XPS were used to investigate the film properties. The existence of the fluoro-alkyl functions CP3—,—CF2—and >CF—was confirmed at the film surfaces. The transmittance of the PC substrate was improved by the coating. These films also have a function as anti-reflective coatings.\",\"PeriodicalId\":23268,\"journal\":{\"name\":\"Transactions of The Institute of Metal Finishing\",\"volume\":\"76 1\",\"pages\":\"51-53\"},\"PeriodicalIF\":1.2000,\"publicationDate\":\"1998-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1080/00202967.1998.11871194\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Transactions of The Institute of Metal Finishing\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://doi.org/10.1080/00202967.1998.11871194\",\"RegionNum\":4,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"ELECTROCHEMISTRY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Transactions of The Institute of Metal Finishing","FirstCategoryId":"88","ListUrlMain":"https://doi.org/10.1080/00202967.1998.11871194","RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"ELECTROCHEMISTRY","Score":null,"Total":0}
Transparent Water-repellent Films Containing Fluoro-alkyl Functions by RF Plasma-enhanced CVD
SummaryTransparent water-repellent films containing fluoro-alkyl functions were prepared on polycarbonate, glass and Si substrates by rf plasma-enhanced CVD. The vapours of the fluoro-alkyl silanes were used as raw materials. The substrate temperature during deposition was around 50°C. The films obtained had good water repellency. The maximum contact angle for a water drop was 107 degrees. The contact angles obtained depended on the number of—(CF2)—in FAS molecules. FTIR and XPS were used to investigate the film properties. The existence of the fluoro-alkyl functions CP3—,—CF2—and >CF—was confirmed at the film surfaces. The transmittance of the PC substrate was improved by the coating. These films also have a function as anti-reflective coatings.
期刊介绍：
Transactions of the Institute of Metal Finishing provides international peer-reviewed coverage of all aspects of surface finishing and surface engineering, from fundamental research to in-service applications. The coverage is principally concerned with the application of surface engineering and coating technologies to enhance the properties of engineering components and assemblies. These techniques include electroplating and electroless plating and their pre- and post-treatments, thus embracing all cleaning pickling and chemical conversion processes, and also complementary processes such as anodising. Increasingly, other processes are becoming important particularly regarding surface profile, texture, opacity, contact integrity, etc.
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