Closed-loop control of a 2-D mems micromirror with sidewall electrodes for a laser scanning microscope system

ABSTRACT This article presents the development and implementation of a robust nonlinear control scheme for a 2-D micromirror-based laser scanning microscope system. The presented control scheme, built around sliding mode control approach and augmented an adaptive algorithm, is proposed to improve the tracking accuracy in presence of cross-axis effect. The closed-loop controlled imaging system is developed through integrating a 2-D micromirror with sidewall electrodes (SW), a laser source, NI field-programmable gate array (FPGA) hardware, the optics, position sensing detector (PSD) and photo detector (PD). The experimental results demonstrated that the proposed scheme is able to achieve accurate tracking of a reference triangular signal. Compared with open-loop control, the scanning performance is significantly improved, and a better 2-D image is obtained using the micromirror with the proposed scheme.