浸笔纳米光刻和聚合物笔光刻中的油墨传输模型

IF 3.3 Q3 NANOSCIENCE & NANOTECHNOLOGY Nanofabrication Pub Date : 2016-01-05 DOI:10.1515/nanofab-2015-0005
A. Urtizberea, Michael Hirtz, H. Fuchs
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引用次数: 27

摘要

浸笔式纳米光刻(DPN)和聚合物笔式光刻(PPL)是一种功能强大的光刻技术,能够对各种油墨进行刻划。传输和表面扩散取决于油墨的物理化学性质,这决定了油墨的扩散和流体特性。表面上的结构组装源于油墨本身的纠缠和与承印物的相互作用之间的平衡。根据输送特性,提出了不同的模型。在本文中,我们回顾了用于图案的常见类型的油墨,使它们遵循不同动力学流动的特定物理化学特性以及描述它们的相应传输机制和模型。
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Ink transport modelling in Dip-Pen Nanolithography and Polymer Pen Lithography
Abstract Dip-pen nanolithography (DPN) and Polymer pen lithography (PPL) are powerful lithography techniques being able to pattern a wide range of inks. Transport and surface spreading depend on the ink physicochemical properties, defining its diffusive and fluid character. Structure assembly on surface arises from a balance between the entanglement of the ink itself and the interaction with the substrate. According to the transport characteristics, different models have been proposed. In this article we review the common types of inks employed for patterning, the particular physicochemical characteristics that make them flow following different dynamics as well as the corresponding transport mechanisms and models that describe them.
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来源期刊
Nanofabrication
Nanofabrication NANOSCIENCE & NANOTECHNOLOGY-
自引率
10.30%
发文量
13
审稿时长
16 weeks
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