用于柔性基板上传感器阵列读出电路的全LTPS TFT电荷积分放大器

Mohit Dandekar;Kris Myny;Wim Dehaene
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摘要

本文介绍了一种用于集成在柔性基板上的电荷输出传感器阵列的读出电路的设计。电荷积分放大器由电流输出跨阻放大器构成,该放大器包括带复位的积分器功能。电荷积分放大器具有全差分内部拓扑结构,比单端设计有所改进,包括专门作为Nauta跨导器实现的反馈放大器。读出电路是在箔上以3-$\mu\text{m}$低温多晶硅工艺制造的,并进行了测量,实现了200kHz的带宽,在5V电源下工作,同时消耗586-$\mu\text{W}$功率,并保持5%的最大积分非线性。
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An All LTPS-TFT-Based Charge-Integrating Amplifier for Sensor-Array Readout Circuit on Flexible Substrate
This article presents the design of a readout circuit for charge-output sensor arrays integrated on a flexible substrate. The charge-integrating amplifier is built with a current-output transimpedance amplifier that includes the integrator function with reset. The charge-integrating amplifier has a fully differential internal topology, improving over single-ended design, including the feedback amplifier implemented specifically as a Nauta-transconductor. The readout circuit has been manufactured in a 3- $\mu \text{m}$ low-temperature polysilicon process on foil and measured, achieving a bandwidth of 200 kHz, operation at a 5-V supply while consuming 586- $\mu \text{W}$ power and maintaining a maximum integral nonlinearity of 5%.
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