电沉积CoNiFe薄膜的软磁性能

O. Shinoura;A. Kamijima;Y. Narumiya
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引用次数: 18

摘要

研究了电沉积CoNiFe薄膜的软磁性能。由30至50重量%Co、23至35重量%Ni和25至35重量%Fe合金组成的具有大于1.5T的高饱和磁通密度的膜在0.2Oe下表现出低矫顽力。由40Co-30 Ni-30Fe合金组成的薄膜,主要由fcc相和一些bec相材料组成,并通过在300°C下退火形成,具有优异的软磁性能(Hc=0.06Oe,μ=3200,Bs=1.8T)。这种bcc相在287°C的结晶第一阶段出现。该结构是热不稳定的,并且是由于电沉积的一个特殊特征。在退火过程中,H2O、H2和CO2从膜中释放,但这些气体的产生模式与DSC模式几乎没有关系。
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Soft Magnetic Properties of Electrodeposited CoNiFe Films
The soft magnetic properties of electrodeposited CoNiFe films were studied. Films composed of 30 to 50 wt% Co, 23 to 35 wt% Ni and 25 to 35 wt% Fe alloy with a high saturation flux density of more than 1.5 T exhibit low coercivities under 0.2 Oe. Film composed of 40 Co-30 Ni-30 Fe alloy, consisting primarily of an fcc phase with some bec phase material and created by annealing at 300°C, has excellent soft magnetic properties (H c =0.06 Oe, μ=3200, B s =1.8 T). This bcc phase makes an appearance during the first stage of crystallization at 287°C. The structure is thermally unstable, and is due to a special feature of electrodeposition. During the annealing, H 2 O, H 2 and CO 2 were released from the film, but the patterns of generation of these gases bear little relation to the DSC pattern.
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