基于12位激光直写光刻的高速、大面积、高精度非球面微透镜阵列制造

{"title":"基于12位激光直写光刻的高速、大面积、高精度非球面微透镜阵列制造","authors":"Shiyi Luan, Fei Peng, Guoxing Zheng, Chengqun Gui, Yi Song, and Sheng Liu","doi":"10.37188/lam.2022.047","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":56519,"journal":{"name":"光:先进制造(英文)","volume":"1 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2022-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"High-speed, large-area and high-precision fabrication of aspheric micro-lens array based on 12-bit direct laser writing lithography\",\"authors\":\"Shiyi Luan, Fei Peng, Guoxing Zheng, Chengqun Gui, Yi Song, and Sheng Liu\",\"doi\":\"10.37188/lam.2022.047\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":56519,\"journal\":{\"name\":\"光:先进制造(英文)\",\"volume\":\"1 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"光:先进制造(英文)\",\"FirstCategoryId\":\"1087\",\"ListUrlMain\":\"https://doi.org/10.37188/lam.2022.047\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"光:先进制造(英文)","FirstCategoryId":"1087","ListUrlMain":"https://doi.org/10.37188/lam.2022.047","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}