{"title":"对半导体生产中控制静电风险的方法和识别使用等电位键合的潜在风险的批评","authors":"Gavin C Rider","doi":"10.3934/electreng.2019.4.397","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":36329,"journal":{"name":"AIMS Electronics and Electrical Engineering","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2019-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A critique of the approach to controlling electrostatic risk in semiconductor production and identification of a potential risk from the use of equipotential bonding\",\"authors\":\"Gavin C Rider\",\"doi\":\"10.3934/electreng.2019.4.397\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":36329,\"journal\":{\"name\":\"AIMS Electronics and Electrical Engineering\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"AIMS Electronics and Electrical Engineering\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.3934/electreng.2019.4.397\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"Engineering\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"AIMS Electronics and Electrical Engineering","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.3934/electreng.2019.4.397","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"Engineering","Score":null,"Total":0}
A critique of the approach to controlling electrostatic risk in semiconductor production and identification of a potential risk from the use of equipotential bonding