外延缓冲层和超导体层应用方法的回顾和评价1

A. Sheth, H. Schmidt, V. Lasrado
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引用次数: 46

摘要

最近在适当纹理基底上沉积的YBCO在77K下的临界电流超过1000000安培/cm2的成就激发了人们对涂层导体在高温和高磁场下的潜在应用的兴趣。目前,离子束辅助沉积(IBAD)和滚动辅助双轴纹理基底(RABiTS)代表了获得纹理基底的两种可用选择。为了在纹理基底上施加缓冲和高温超导体(HTS)材料的合适涂层,有几种选择,包括溅射、电子束蒸发、激光烧蚀、电泳、化学气相沉积(包括金属有机物化学气相沉淀)、溶胶-凝胶、金属有机物分解、,电沉积和气溶胶/喷雾热解。由上述技术的任何适当组合开发的商业连续长导线/带制造方案将包括衬底的制备和缓冲、HTS和钝化/绝缘材料的应用以及特殊处理步骤,如后退火。这些操作可以受到各种工艺参数的影响,这些工艺参数可以分为化学、材料、工程和环境相关参数。为了进行工程评估:(i)为各种候选方案制定了工艺流程方案,确定了主要操作步骤、工艺条件和工艺流程;(ii)为了评估可量化的参数,如工艺严重程度(如温度和压力)、HTS材料的涂层厚度和沉积速率、实现的最大Jc值、化学品成本和材料利用效率,使用多属性方法来确定各种参数和候选选项的属性/优点。为了确定不可量化参数的相似属性值,使用了主观评估。然后将两次评估的结果结合起来,使用加权因子计算给定选项的总体优点/效用。为了评估任意确定的加权因子的影响,使用三组不同的加权因子进行了敏感性分析。最后,使用不同的加权因子集计算的总体效用/优点值的结果被用来确定候选选项之间的初步排名。本文给出了为各种方案制定的工艺流程方案,以及使用这些方案对候选方案进行的工程评估结果。
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Review and evaluation of methods for application of epitaxial buffer and superconductor layers1

The recent achievements of critical currents exceeding 1,000,000 amps/cm2 at 77 K in YBCO deposited over suitably textured substrate have stimulated interest in the potential applications of coated conductors at high temperatures and in high magnetic fields. Currently, ion-beam assisted deposition (IBAD), and rolling assisted bi-axially textured substrate (RABiTS), represent two available options for obtaining textured substrates. For applying suitable coatings of buffer and high temperature superconductor (HTS) material over textured substrates, several options are available which include sputtering, electron-beam evaporation, laser ablation, electrophoresis, chemical vapor deposition (including metal organics chemical vapor deposition), sol-gel, metal organics decomposition, electrodeposition and aerosol/spray pyrolysis. A commercial continuous long-length wire/tape manufacturing scheme developed out of any suitable combination of the above techniques would consist of operations involving preparation of the substrate and application of buffer, HTS and passivation/insulation materials and special treatment steps such as post-annealing. These operations can be effected by various process parameters that can be classified into chemistry, materials, engineering and environmental related parameters. To carry out an engineering evaluation: (i) the process flow schemes were developed for various candidate options identifying the major operating steps, process conditions, and process streams; (ii) to evaluate quantifiable parameters such as process severity (e.g. temperature and pressure), coating thickness and deposition rate for HTS material, achieved maximum Jc value, and cost of chemicals and material utilization efficiency, the multi-attribute method was used to determine attributes/merits for various parameters and candidate options. To determine similar attribute values for the non-quantifiable parameters, a subjective evaluation was used. Results of the two evaluations were then combined to calculate the overall merit/utility of a given option using weighting factors. To evaluate the effect of arbitrarily determined weighting factors, a sensitivity analysis was carried out by using three different sets of weighting factors. In the end, the results of the overall utility/merit values calculated using different sets of weighting factors were utilized to determine the preliminary ranking among the candidate options. The process flow schemes developed for various options, as well as the results of the engineering evaluation carried out for the candidate options using these schemes, are given in this paper.

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