SAW气体传感的新特性

V. Anisimkin, P. Verardi, Enrico Verona
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引用次数: 0

摘要

从理论上预测了声表面波气体传感的新颖吸引特性,并进行了实验验证。结果表明,只要正确选择声衬底材料及其晶体取向,就可以在不改变敏感层的情况下增加、减少、逆转、消除、加速、老化和选择声表面波响应。这些新特性来自于声波的椭圆偏振及其对传播条件的依赖。在暴露于1% H/sub / /+N/sub / /、1% CO+N/sub / /和1% N/sub / /O+N/sub / /混合气体下,利用沉积在ATx-、STx-和yx-石英衬底上的Pd和Pd:Ni敏感膜,对SAW H/sub / /传感器的理论预测进行了实验验证。这些新的特性将使开发新一代声表面波传感器成为可能。
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New properties of the SAW gas sensing
Novel attractive properties of SAW gas sensing are theoretically predicted and experimentally verified. It is demonstrated that the SAW response can be increased, decreased, reversed, cancelled, speeded up, aged down and selected without changing the sensitive layer, simply by properly selecting the acoustic substrate material and its crystallographic orientation. These new properties are shown to come from the elliptic polarization of the acoustic wave and from its dependence on the propagation conditions. An experimental verification of the theoretical predictions is carried out on SAW H/sub 2/ sensors using both Pd and Pd:Ni sensitive films, deposited on ATx-, STx- and yx-quartz substrates upon exposure to 1% H/sub 2/+N/sub 2/, 1% CO+N/sub 2/ and 1% N/sub 2/O+N/sub 2/ gas mixtures. These new peculiarities will make possible to develop a new generation of SAW sensors.
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