SAW气体传感的新特性

V. Anisimkin, P. Verardi, Enrico Verona
{"title":"SAW气体传感的新特性","authors":"V. Anisimkin, P. Verardi, Enrico Verona","doi":"10.1109/ULTSYM.1997.663049","DOIUrl":null,"url":null,"abstract":"Novel attractive properties of SAW gas sensing are theoretically predicted and experimentally verified. It is demonstrated that the SAW response can be increased, decreased, reversed, cancelled, speeded up, aged down and selected without changing the sensitive layer, simply by properly selecting the acoustic substrate material and its crystallographic orientation. These new properties are shown to come from the elliptic polarization of the acoustic wave and from its dependence on the propagation conditions. An experimental verification of the theoretical predictions is carried out on SAW H/sub 2/ sensors using both Pd and Pd:Ni sensitive films, deposited on ATx-, STx- and yx-quartz substrates upon exposure to 1% H/sub 2/+N/sub 2/, 1% CO+N/sub 2/ and 1% N/sub 2/O+N/sub 2/ gas mixtures. These new peculiarities will make possible to develop a new generation of SAW sensors.","PeriodicalId":6369,"journal":{"name":"1997 IEEE Ultrasonics Symposium Proceedings. An International Symposium (Cat. No.97CH36118)","volume":"66 4","pages":"405-408 vol.1"},"PeriodicalIF":0.0000,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"New properties of the SAW gas sensing\",\"authors\":\"V. Anisimkin, P. Verardi, Enrico Verona\",\"doi\":\"10.1109/ULTSYM.1997.663049\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Novel attractive properties of SAW gas sensing are theoretically predicted and experimentally verified. It is demonstrated that the SAW response can be increased, decreased, reversed, cancelled, speeded up, aged down and selected without changing the sensitive layer, simply by properly selecting the acoustic substrate material and its crystallographic orientation. These new properties are shown to come from the elliptic polarization of the acoustic wave and from its dependence on the propagation conditions. An experimental verification of the theoretical predictions is carried out on SAW H/sub 2/ sensors using both Pd and Pd:Ni sensitive films, deposited on ATx-, STx- and yx-quartz substrates upon exposure to 1% H/sub 2/+N/sub 2/, 1% CO+N/sub 2/ and 1% N/sub 2/O+N/sub 2/ gas mixtures. These new peculiarities will make possible to develop a new generation of SAW sensors.\",\"PeriodicalId\":6369,\"journal\":{\"name\":\"1997 IEEE Ultrasonics Symposium Proceedings. An International Symposium (Cat. No.97CH36118)\",\"volume\":\"66 4\",\"pages\":\"405-408 vol.1\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1997-10-05\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"1997 IEEE Ultrasonics Symposium Proceedings. An International Symposium (Cat. No.97CH36118)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ULTSYM.1997.663049\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"1997 IEEE Ultrasonics Symposium Proceedings. An International Symposium (Cat. No.97CH36118)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ULTSYM.1997.663049","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

摘要

从理论上预测了声表面波气体传感的新颖吸引特性,并进行了实验验证。结果表明,只要正确选择声衬底材料及其晶体取向,就可以在不改变敏感层的情况下增加、减少、逆转、消除、加速、老化和选择声表面波响应。这些新特性来自于声波的椭圆偏振及其对传播条件的依赖。在暴露于1% H/sub / /+N/sub / /、1% CO+N/sub / /和1% N/sub / /O+N/sub / /混合气体下,利用沉积在ATx-、STx-和yx-石英衬底上的Pd和Pd:Ni敏感膜,对SAW H/sub / /传感器的理论预测进行了实验验证。这些新的特性将使开发新一代声表面波传感器成为可能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
New properties of the SAW gas sensing
Novel attractive properties of SAW gas sensing are theoretically predicted and experimentally verified. It is demonstrated that the SAW response can be increased, decreased, reversed, cancelled, speeded up, aged down and selected without changing the sensitive layer, simply by properly selecting the acoustic substrate material and its crystallographic orientation. These new properties are shown to come from the elliptic polarization of the acoustic wave and from its dependence on the propagation conditions. An experimental verification of the theoretical predictions is carried out on SAW H/sub 2/ sensors using both Pd and Pd:Ni sensitive films, deposited on ATx-, STx- and yx-quartz substrates upon exposure to 1% H/sub 2/+N/sub 2/, 1% CO+N/sub 2/ and 1% N/sub 2/O+N/sub 2/ gas mixtures. These new peculiarities will make possible to develop a new generation of SAW sensors.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
Diamond wafer for SAW application High contrast images of defects in food package seals New properties of the SAW gas sensing Electromagnetic acoustic resonance for studying dislocation formation in polycrystalline pure copper during deformation A new design of ultrasonic air-coupled ribbon transducer
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1