硅的激光直接蚀刻纳米结构

{"title":"硅的激光直接蚀刻纳米结构","authors":"M. Mullenborn, H. Dirac, F. Grey","doi":"10.1109/CLEOE.1996.562394","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":11780,"journal":{"name":"EQEC'96. 1996 European Quantum Electronic Conference","volume":"66 1","pages":"154-154"},"PeriodicalIF":0.0000,"publicationDate":"2002-08-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Nanostructures be Laser Direct Etching of Silicon\",\"authors\":\"M. Mullenborn, H. Dirac, F. Grey\",\"doi\":\"10.1109/CLEOE.1996.562394\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":11780,\"journal\":{\"name\":\"EQEC'96. 1996 European Quantum Electronic Conference\",\"volume\":\"66 1\",\"pages\":\"154-154\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2002-08-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"EQEC'96. 1996 European Quantum Electronic Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/CLEOE.1996.562394\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"EQEC'96. 1996 European Quantum Electronic Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CLEOE.1996.562394","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}