基于Au/WO3/Pt薄膜的异芯光纤氢传感器特性

Yuji Nagao, Koji Yuhashi, A. Hosoki, M. Nishiyama, S. Kubodera, Kazuhiro Watanabe
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摘要

本文提出了一种采用射频磁控溅射技术制备多层金(Au)、三氧化钨(WO3)和铂(Pt)薄膜的异质芯光纤氢传感器。我们成功地利用表面等离子体共振(SPR)探测氢,它对光纤外部的折射率变化有明显的响应。通过改变WO3薄膜的厚度,可以调节氢传感器透射光谱的吸收峰。因此,在实际应用中使用波长为850 nm的红外LED光源可以使传感器具有良好的灵敏度。我们还通过评估使用LED 850 nm波长的时间响应来评估传感器作为氢传感器的测量再现性。
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Characteristics of hetero-core optical fiber hydrogen sensor based on Au/WO3/Pt thin film
In this paper, we propose a hetero-core optical fiber hydrogen sensor with multilayer gold (Au), tungsten trioxide (WO3), and platinum (Pt) films formed by Radio Frequency (RF) magnetron sputtering technique. We succeeded in detecting hydrogen by using surface plasmon resonance (SPR), which can show a sharp response to the refractive index change of the outside of the fiber. The absorption peak of transmitted spectra in the proposed hydrogen sensor can be adjusted by changing the thickness of the WO3 film. Therefore, it was found that the sensor could have good sensitivity with an infrared LED light source 850 nm wavelength used in practical usage. We also evaluated the measurement reproducibility of the sensor as a hydrogen sensor by evaluating the time response using the LED 850 nm wavelength.
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