纳米致动器和“回拉”非线性

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI:10.1109/MEMSYS.2013.6474343

M. Ren, H. Lai, L. Isai, D. Kwong, A. Liu

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摘要

本文介绍了一种光力驱动的纳米机械致动器和光机械环形谐振器系统中独立弧的“回拉”效应。在2.8 mW的固定光功率下，通过调节控制光的波长，该纳米驱动器的最大中心位移为43.1 nm，驱动分辨率为0.28 nm。采用实验与仿真相结合的方法，对最大位移位置的“回拉”效应进行了研究。潜在的应用包括生物纳米马达、全光开关和光机械存储器。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Nano actuator and “pull-back” nonlinearity

This paper presents an optical force driven nano-machined actuator and the “pull-back” effect of a free-standing arc in an opto-mechanical ring resonator system. This nano-actuator obtains a maximal central displacement of 43.1 nm, with an actuation resolution of 0.28 nm, via tuning the wavelength of the control light at a fixed optical power of 2.8 mW. The “pull-back” effect occurs at the maximal displacement position, which is studied by the combination of experiments and simulation. Potential applications include bio-nano-motor, all-optical switches and opto-mechanical memories.

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2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)

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