M. Lee, C. Hsieh, Y. You, V. Su, Po-Hsun Chen, Hung-Chou Lin, Han-Bo Yang, Hung-Ming Chen, C. Kuan
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Performance enhancement in quantum well infrared photodetector utilizing the grating structure
We fabricate four different size grating structure on the top of the quantum well infrared photodetectors, then etch them into four different etching depth. With suitable design, the peak responsivity of the QWIPs is about thirteen times larger than that of the conventional QWIP.
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