{"title":"用于射频无源元件的MEMS技术","authors":"J. Iannacci, A. Faes, B. Margesin","doi":"10.1145/2093698.2093778","DOIUrl":null,"url":null,"abstract":"In this work a wide overview on the exploitation of MEMS technology (MicroElectroMechanical-Systems) for Radio Frequency (i.e. RF-MEMS) and telecommunication systems is provided. In the last 10-15 years MEMS technology proved to be a valuable solution for the realization of passive components for RF circuits, like variable capacitors (i.e. varactors), inductors, switches (i.e. micro-relays), as well as more complex networks, like RF filters, impedance matching tuners etc., with remarkable characteristics in terms of low-loss, high Q-factor (quality factor), and large reconfigurability. The integration within RF circuits and platforms, of passive lumped elements and networks with such prominent characteristics, would lead to a significant increase of performance and reconfigurability of the whole system (e.g. mobile handset, satellite, radar, and so on).","PeriodicalId":91990,"journal":{"name":"... International Symposium on Applied Sciences in Biomedical and Communication Technologies. International Symposium on Applied Sciences in Biomedical and Communication Technologies","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2011-10-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"MEMS technology for RF passive components\",\"authors\":\"J. Iannacci, A. Faes, B. Margesin\",\"doi\":\"10.1145/2093698.2093778\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this work a wide overview on the exploitation of MEMS technology (MicroElectroMechanical-Systems) for Radio Frequency (i.e. RF-MEMS) and telecommunication systems is provided. In the last 10-15 years MEMS technology proved to be a valuable solution for the realization of passive components for RF circuits, like variable capacitors (i.e. varactors), inductors, switches (i.e. micro-relays), as well as more complex networks, like RF filters, impedance matching tuners etc., with remarkable characteristics in terms of low-loss, high Q-factor (quality factor), and large reconfigurability. The integration within RF circuits and platforms, of passive lumped elements and networks with such prominent characteristics, would lead to a significant increase of performance and reconfigurability of the whole system (e.g. mobile handset, satellite, radar, and so on).\",\"PeriodicalId\":91990,\"journal\":{\"name\":\"... International Symposium on Applied Sciences in Biomedical and Communication Technologies. International Symposium on Applied Sciences in Biomedical and Communication Technologies\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2011-10-26\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"... International Symposium on Applied Sciences in Biomedical and Communication Technologies. International Symposium on Applied Sciences in Biomedical and Communication Technologies\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1145/2093698.2093778\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"... International Symposium on Applied Sciences in Biomedical and Communication Technologies. International Symposium on Applied Sciences in Biomedical and Communication Technologies","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1145/2093698.2093778","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
In this work a wide overview on the exploitation of MEMS technology (MicroElectroMechanical-Systems) for Radio Frequency (i.e. RF-MEMS) and telecommunication systems is provided. In the last 10-15 years MEMS technology proved to be a valuable solution for the realization of passive components for RF circuits, like variable capacitors (i.e. varactors), inductors, switches (i.e. micro-relays), as well as more complex networks, like RF filters, impedance matching tuners etc., with remarkable characteristics in terms of low-loss, high Q-factor (quality factor), and large reconfigurability. The integration within RF circuits and platforms, of passive lumped elements and networks with such prominent characteristics, would lead to a significant increase of performance and reconfigurability of the whole system (e.g. mobile handset, satellite, radar, and so on).