{"title":"使用气体薄片的电子束检测;使用气体薄片的电子束检测;Gas Sheet Detection of Electron Beam with a Gas Sheet","authors":"Norio Ogiwara, Yusuke Hikichi, Junichiro Kamiya, Michikazu Kinsho","doi":"10.3131/JVSJ2.59.79","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"110 1","pages":"79-82"},"PeriodicalIF":0.0000,"publicationDate":"2016-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"ガスシートを用いた電子ビームの検出;ガスシートを用いた電子ビームの検出;Detection of Electron Beam with a Gas Sheet\",\"authors\":\"Norio Ogiwara, Yusuke Hikichi, Junichiro Kamiya, Michikazu Kinsho\",\"doi\":\"10.3131/JVSJ2.59.79\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":17344,\"journal\":{\"name\":\"Journal of The Vacuum Society of Japan\",\"volume\":\"110 1\",\"pages\":\"79-82\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2016-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of The Vacuum Society of Japan\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.3131/JVSJ2.59.79\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of The Vacuum Society of Japan","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.3131/JVSJ2.59.79","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}