{"title":"ArF激光诱导氟化钙窗的荧光依赖性吸收","authors":"Jue Wang, G. Cox, I. Balasa, L. Jensen","doi":"10.1364/FIO.2020.FTU2C.3","DOIUrl":null,"url":null,"abstract":"High throughput of microelectronic fabrication demands high performance CaF2 laser optics. Based on ArF laser-induced fluence-dependent absorption, we derived one-photon/two-photon absorption, and surface/subsurface absorption of CaF2 windows.","PeriodicalId":91683,"journal":{"name":"Frontiers in optics. Annual Meeting of the Optical Society of America","volume":"32 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2020-09-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"ArF Laser-Induced Fluence-Dependent Absorption of Calcium Fluoride Windows\",\"authors\":\"Jue Wang, G. Cox, I. Balasa, L. Jensen\",\"doi\":\"10.1364/FIO.2020.FTU2C.3\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"High throughput of microelectronic fabrication demands high performance CaF2 laser optics. Based on ArF laser-induced fluence-dependent absorption, we derived one-photon/two-photon absorption, and surface/subsurface absorption of CaF2 windows.\",\"PeriodicalId\":91683,\"journal\":{\"name\":\"Frontiers in optics. Annual Meeting of the Optical Society of America\",\"volume\":\"32 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-09-14\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Frontiers in optics. Annual Meeting of the Optical Society of America\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/FIO.2020.FTU2C.3\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Frontiers in optics. Annual Meeting of the Optical Society of America","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/FIO.2020.FTU2C.3","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
ArF Laser-Induced Fluence-Dependent Absorption of Calcium Fluoride Windows
High throughput of microelectronic fabrication demands high performance CaF2 laser optics. Based on ArF laser-induced fluence-dependent absorption, we derived one-photon/two-photon absorption, and surface/subsurface absorption of CaF2 windows.
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