大气介质阻挡放电对ZnO薄膜光学、电学和表面性能的影响

Anil Pudasaini, D. K. Chaudhary, R. Chalise, Pitamber Shrestha, L. Joshi, R. Khanal
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摘要

在众多的金属氧化物半导体中,氧化锌(ZnO)因其无毒、可调谐的电学和光学性质以及良好的热稳定性和化学稳定性而成为应用最广泛的材料之一。本研究旨在研究常压下介质阻挡放电(DBD)等离子体处理ZnO薄膜的光学、电学和表面特性的调谐。结果表明,其光学带隙明显减小,但电导率有所增加。接触角测量结果清楚地显示了dbd处理的ZnO薄膜从疏水到亲水的表面性质变化。
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Effect of Atmospheric Dielectric Barrier Discharge on Optical, Electrical and Surface Properties of ZnO Film
Among the numerous metal oxide semiconductors, zinc oxide (ZnO) is one of the most widely used materials in various fields due to its non-toxic nature, tunable electric and optical properties, and good thermal and chemical stability. This research aims to study the tuning of optical, electrical, and surface properties of ZnO film treated with dielectric barrier discharge (DBD) plasma produced at atmospheric pressure. The result revealed a significant decrease in its optical band gap, but there was an increase in conductivity. The results of contact angle measurement clearly showed the change of surface nature from hydrophobic to hydrophilic for DBD-treated ZnO film.
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