{"title":"脉冲CO2激光在硅中的吸收及其引起的激光烧蚀和表面损伤的形成","authors":"T. Sakka, Satoshi Akiba, Akira Kuroyanagi, Kokichi Hotta, Y. Ogata, M. Mabuchi","doi":"10.1016/S1288-3255(99)80003-3","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":101031,"journal":{"name":"Plasmas & Ions","volume":"2 1","pages":"23-28"},"PeriodicalIF":0.0000,"publicationDate":"1998-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"8","resultStr":"{\"title\":\"Absorption of pulsed CO2 laser in silicon and resulting laser ablation and surface damage formation\",\"authors\":\"T. Sakka, Satoshi Akiba, Akira Kuroyanagi, Kokichi Hotta, Y. Ogata, M. Mabuchi\",\"doi\":\"10.1016/S1288-3255(99)80003-3\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":101031,\"journal\":{\"name\":\"Plasmas & Ions\",\"volume\":\"2 1\",\"pages\":\"23-28\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1998-09-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"8\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Plasmas & Ions\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1016/S1288-3255(99)80003-3\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Plasmas & Ions","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1016/S1288-3255(99)80003-3","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 8