脉冲CO2激光在硅中的吸收及其引起的激光烧蚀和表面损伤的形成

T. Sakka, Satoshi Akiba, Akira Kuroyanagi, Kokichi Hotta, Y. Ogata, M. Mabuchi
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Absorption of pulsed CO2 laser in silicon and resulting laser ablation and surface damage formation
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