{"title":"利用飞秒激光制备低电阻率、高载流子浓度的zno基TCO","authors":"Yaoyao Liu, Qiang Wu, J. Yao, Jingjun Xu","doi":"10.1364/cleo_at.2022.jw3b.174","DOIUrl":null,"url":null,"abstract":"ZnO-based TCO with a resistivity of 1.93×10-4 Ω cm was achieved by femtosecond laser processing without elements doping. Besides, the carrier density increased by five orders of magnitude compared to the pristine one.","PeriodicalId":72688,"journal":{"name":"Conference on Lasers and Electro-optics : (CLEO). Conference on Lasers and Electro-optics","volume":"1 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2022-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"The ZnO-based TCO with low resistivity and high carrier concentration prepared by femtosecond laser\",\"authors\":\"Yaoyao Liu, Qiang Wu, J. Yao, Jingjun Xu\",\"doi\":\"10.1364/cleo_at.2022.jw3b.174\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"ZnO-based TCO with a resistivity of 1.93×10-4 Ω cm was achieved by femtosecond laser processing without elements doping. Besides, the carrier density increased by five orders of magnitude compared to the pristine one.\",\"PeriodicalId\":72688,\"journal\":{\"name\":\"Conference on Lasers and Electro-optics : (CLEO). Conference on Lasers and Electro-optics\",\"volume\":\"1 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Conference on Lasers and Electro-optics : (CLEO). Conference on Lasers and Electro-optics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/cleo_at.2022.jw3b.174\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Conference on Lasers and Electro-optics : (CLEO). Conference on Lasers and Electro-optics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/cleo_at.2022.jw3b.174","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
The ZnO-based TCO with low resistivity and high carrier concentration prepared by femtosecond laser
ZnO-based TCO with a resistivity of 1.93×10-4 Ω cm was achieved by femtosecond laser processing without elements doping. Besides, the carrier density increased by five orders of magnitude compared to the pristine one.
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