N. Ramgir, S. Ganapathi, M. Kaur, S. Mishra, N. Datta, D. K. Aswal, S. Gupta, J. Yakhmi
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引用次数: 3
摘要
研究了纯WO3薄膜和Au掺杂WO3薄膜对H2S和Cl2的气敏性能。传感器膜能够在150°C和200°C的工作温度下选择性地检测H2S和Cl2。研究了气体浓度和载金量的影响，并将其与观测到的灵敏度值进行了关联。纯WO3薄膜对H2S (S = 17,10 ppm, 150°C)表现出更好的传感特性，而含Au厚度为21.6 nm的传感器薄膜对Cl2 (S = 89, 10 ppm, 200°C)表现出最大的灵敏度。
Improved H2S and Cl2 Sensing Characteristics of Pure and Au Incorporated WO3 Thin Films
Gas sensing properties of pure and Au incorporated WO3 thin films towards H2S and Cl2 have been investigated. The sensor films were able to detect H2S and Cl2 selectively at an operating temperature of 150 and 200 °C, respectively. Effect of gas concentration and Au loading have been investigated and correlated with the observed sensitivity values. Pure WO3 films exhibited better sensing characteristics towards H2S (S = 17, 10 ppm, 150 °C) while sensor film containing Au thickness of 21.6 nm exhibited a maximum sensitivity towards Cl2 (S = 89, 10 ppm, 200 °C)..
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