多功能镀膜玻璃用TiNxOy薄膜的APCVD制备

2009 Conference on Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics Pub Date : 2009-10-30 DOI:10.1109/CLEOPR.2009.5292424

Gangfeng Duan, Gaoling Zhao, Xiaoxuan Lin, Tianbo Zhang, G. Han

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摘要

采用简单的常压化学气相沉积法在玻璃基板上沉积了TiNxOy薄膜。所制备的膜具有太阳能控制性能和自清洁性能，适用于多功能镀膜玻璃。

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APCVD preparation of TiNxOy film for multi-functional coating glass

A simple atmospheric pressure chemical vapor deposition method was employed to deposit TiNxOy film on glass substrate. The obtained film combined the solar control performance and self-cleaning properties, which was suitable for multi-functional coating glass.

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来源期刊

2009 Conference on Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics

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