一个0.4V ~ 1V 0.2A/mm2 70%效率500MHz全集成数字控制3电平降压稳压器与片上高密度MIM电容器在22nm三栅极CMOS

Pavan Kumar, V. Vaidya, H. Krishnamurthy, Stephen T. Kim, G. Matthew, Sheldon Weng, Bharani Thiruvengadam, W. Proefrock, K. Ravichandran, V. De
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引用次数: 21

摘要

由于电感固有的可扩展性不足,电压调节器(VR)的单片集成具有挑战性。减小电感尺寸的电路技术对提高功率密度和可扩展性具有吸引力。本文提出了一种效率为70~72%、500MHz的3电平Buck虚拟现实,该虚拟现实采用全片上螺旋电感,实现在带有MIM电容的22nm三栅CMOS上。在宽范围动态电压和频率缩放(DVFS)的3电平变换器优于传统的解决方案,如线性稳压器和降压VRs。
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A 0.4V∼1V 0.2A/mm2 70% efficient 500MHz fully integrated digitally controlled 3-level buck voltage regulator with on-die high density MIM capacitor in 22nm tri-gate CMOS
Monolithic integration of Voltage Regulators (VR) is challenging given the inherent lack of scalability of inductor. Circuit techniques to reduce inductor size are attractive to increase power density and scalability. This paper presents a 70~72% efficient, 500MHz digitally controlled 3-level Buck VR with a fully on-die spiral inductor implemented on 22nm Tri-Gate CMOS with MIM capacitors. The advantages of the 3-level converter for wide range Dynamic Voltage & Frequency Scaling (DVFS) over traditional solutions like linear regulators & Buck VRs are demonstrated.
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