Characterization of Anatase and Rutile Phase of TiO2 Nanostructures with Different Thermal Annealing

TiO2 nanostructures were prepared by anodization of Ti foils. The TiO2 nanostructure films were annealed at the temperature range of 500°C to 900°C for 2 h. The morphology, elemental composition, and crystallization of TiO2 nanostructures were analyzed by field emission scanning electron microscopy (FE-SEM), X-ray diffraction (XRD), Raman spectra, and X-ray spectroscopy (XPS), respectively. XRD and Raman spectra results confirm the presence of the anatase phase for TiO2 nanostructure films which were annealed at 500°C to 700°C. Furthermore, it found that anatase to rutile phase transition occurred at temperature above 700oC.