基于波导耦合纳米力学光子晶体腔的片上光电流位移传感器

2019 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC) Pub Date : 2019-10-17 DOI:10.1109/CLEOE-EQEC.2019.8871530

F. Galeotti, I. S. Vollenbroek, M. Petruzzella, F. Pagliano, F. V. van Otten, Ž. Zobenica, H. S. Marnani, A. Mohtashami, R. W. van der Heijden, A. Fiore

{"title":"基于波导耦合纳米力学光子晶体腔的片上光电流位移传感器","authors":"F. Galeotti, I. S. Vollenbroek, M. Petruzzella, F. Pagliano, F. V. van Otten, Ž. Zobenica, H. S. Marnani, A. Mohtashami, R. W. van der Heijden, A. Fiore","doi":"10.1109/CLEOE-EQEC.2019.8871530","DOIUrl":null,"url":null,"abstract":"A nano-opto-electro-mechanical transducer for displacement sensing is presented. It consists of a double-membrane photonic crystal cavity integrated with electro-optical read-out and on-chip light-delivery. The operation is demonstrated by atomic force microscope actuation and photocurrent sensing.","PeriodicalId":6714,"journal":{"name":"2019 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC)","volume":"36 1","pages":"1-1"},"PeriodicalIF":0.0000,"publicationDate":"2019-10-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"On-Chip Photocurrent Displacement Sensor Based on a Waveguide-Coupled Nanomechanical Photonic Crystal Cavity\",\"authors\":\"F. Galeotti, I. S. Vollenbroek, M. Petruzzella, F. Pagliano, F. V. van Otten, Ž. Zobenica, H. S. Marnani, A. Mohtashami, R. W. van der Heijden, A. Fiore\",\"doi\":\"10.1109/CLEOE-EQEC.2019.8871530\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A nano-opto-electro-mechanical transducer for displacement sensing is presented. It consists of a double-membrane photonic crystal cavity integrated with electro-optical read-out and on-chip light-delivery. The operation is demonstrated by atomic force microscope actuation and photocurrent sensing.\",\"PeriodicalId\":6714,\"journal\":{\"name\":\"2019 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC)\",\"volume\":\"36 1\",\"pages\":\"1-1\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-10-17\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2019 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/CLEOE-EQEC.2019.8871530\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CLEOE-EQEC.2019.8871530","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 1

摘要

提出了一种用于位移传感的纳米光电机械传感器。它由集成电光读出和片上光传输的双膜光子晶体腔组成。通过原子力显微镜驱动和光电流传感对其进行了验证。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文

微信好友朋友圈 QQ好友复制链接

本刊更多论文

On-Chip Photocurrent Displacement Sensor Based on a Waveguide-Coupled Nanomechanical Photonic Crystal Cavity

A nano-opto-electro-mechanical transducer for displacement sensing is presented. It consists of a double-membrane photonic crystal cavity integrated with electro-optical read-out and on-chip light-delivery. The operation is demonstrated by atomic force microscope actuation and photocurrent sensing.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2019 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC)

自引率

0.00%

发文量