{"title":"基于探针的集成系统组装纳米光学器件","authors":"L. Fok, Y.H. Liu, W.J. Li","doi":"10.1109/NANO.2007.4601246","DOIUrl":null,"url":null,"abstract":"Repeatable manipulation and auto-assembly of nano-scale components is a critical potential for future developments in nano optics, opto-electronics, hybrid microelectromechanical (MEMS) systems, and nano-scale devices. This paper focuses on the fabrication of nano structures using single probe with force feedback. The structures that are fabricated can be used for both rapid prototyping and for replication. A description of the manipulation system is presented along with a discussion on the basic manipulation capabilities. Force feedback has been employed, the vertical contact force was determined by a force control system during manipulation.","PeriodicalId":6415,"journal":{"name":"2007 7th IEEE Conference on Nanotechnology (IEEE NANO)","volume":"52 1","pages":"524-529"},"PeriodicalIF":0.0000,"publicationDate":"2007-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Assembly of nano optics by an integrated probe-based system\",\"authors\":\"L. Fok, Y.H. Liu, W.J. Li\",\"doi\":\"10.1109/NANO.2007.4601246\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Repeatable manipulation and auto-assembly of nano-scale components is a critical potential for future developments in nano optics, opto-electronics, hybrid microelectromechanical (MEMS) systems, and nano-scale devices. This paper focuses on the fabrication of nano structures using single probe with force feedback. The structures that are fabricated can be used for both rapid prototyping and for replication. A description of the manipulation system is presented along with a discussion on the basic manipulation capabilities. Force feedback has been employed, the vertical contact force was determined by a force control system during manipulation.\",\"PeriodicalId\":6415,\"journal\":{\"name\":\"2007 7th IEEE Conference on Nanotechnology (IEEE NANO)\",\"volume\":\"52 1\",\"pages\":\"524-529\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2007-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2007 7th IEEE Conference on Nanotechnology (IEEE NANO)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/NANO.2007.4601246\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 7th IEEE Conference on Nanotechnology (IEEE NANO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NANO.2007.4601246","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Assembly of nano optics by an integrated probe-based system
Repeatable manipulation and auto-assembly of nano-scale components is a critical potential for future developments in nano optics, opto-electronics, hybrid microelectromechanical (MEMS) systems, and nano-scale devices. This paper focuses on the fabrication of nano structures using single probe with force feedback. The structures that are fabricated can be used for both rapid prototyping and for replication. A description of the manipulation system is presented along with a discussion on the basic manipulation capabilities. Force feedback has been employed, the vertical contact force was determined by a force control system during manipulation.
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