{"title":"用于工业微加工应用的高Q SpiritTM激光系统","authors":"V. Matylitsky, F. Hendricks, J. Aus der Au","doi":"10.1364/CLEO_AT.2013.ATH3K.3","DOIUrl":null,"url":null,"abstract":"Unique advantage of solid material processing with femtosecond lasers is high ablation efficiency and processing accuracy. We will show aspects of HighQ SpiritTM femtosecond laser system performance and give overview of its actual applications.","PeriodicalId":10254,"journal":{"name":"CLEO: 2013","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2013-06-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"High Q SpiritTM laser systems for industrial micro-processing applications\",\"authors\":\"V. Matylitsky, F. Hendricks, J. Aus der Au\",\"doi\":\"10.1364/CLEO_AT.2013.ATH3K.3\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Unique advantage of solid material processing with femtosecond lasers is high ablation efficiency and processing accuracy. We will show aspects of HighQ SpiritTM femtosecond laser system performance and give overview of its actual applications.\",\"PeriodicalId\":10254,\"journal\":{\"name\":\"CLEO: 2013\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-06-09\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"CLEO: 2013\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/CLEO_AT.2013.ATH3K.3\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"CLEO: 2013","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/CLEO_AT.2013.ATH3K.3","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
High Q SpiritTM laser systems for industrial micro-processing applications
Unique advantage of solid material processing with femtosecond lasers is high ablation efficiency and processing accuracy. We will show aspects of HighQ SpiritTM femtosecond laser system performance and give overview of its actual applications.