{"title":"放电对硅烷和氨的影响","authors":"J. Drake, N. Westwood","doi":"10.1039/J19710002587","DOIUrl":null,"url":null,"abstract":"The effect of both ozoniser-type silent electric discharges and microwave discharges on silane, ammonia, and silane–ammonia mixtures is discussed. Silicon nitride films are formed in the microwave discharge of the latter.","PeriodicalId":17321,"journal":{"name":"Journal of The Chemical Society A: Inorganic, Physical, Theoretical","volume":"31 1","pages":"2587-2589"},"PeriodicalIF":0.0000,"publicationDate":"1971-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"Effect of electrical discharge on silane and ammonia\",\"authors\":\"J. Drake, N. Westwood\",\"doi\":\"10.1039/J19710002587\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The effect of both ozoniser-type silent electric discharges and microwave discharges on silane, ammonia, and silane–ammonia mixtures is discussed. Silicon nitride films are formed in the microwave discharge of the latter.\",\"PeriodicalId\":17321,\"journal\":{\"name\":\"Journal of The Chemical Society A: Inorganic, Physical, Theoretical\",\"volume\":\"31 1\",\"pages\":\"2587-2589\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1971-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of The Chemical Society A: Inorganic, Physical, Theoretical\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1039/J19710002587\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of The Chemical Society A: Inorganic, Physical, Theoretical","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1039/J19710002587","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Effect of electrical discharge on silane and ammonia
The effect of both ozoniser-type silent electric discharges and microwave discharges on silane, ammonia, and silane–ammonia mixtures is discussed. Silicon nitride films are formed in the microwave discharge of the latter.
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