碱火焰电离填充柱气相色谱法测定磷化氢

Analytical Communications Pub Date : 1998-01-01 DOI:10.1039/A801070F

M. Chughtai, J. Pridham

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引用次数: 14

摘要

建立了用填充柱等温气相色谱法测定磷化氢的方法并进行了验证。检测限为0.01 ng ml-1，在0.1 ~ 1.0和2.5 ~ 25 ng ml-1范围内呈线性关系。0.1 ng ml-1的重现性RSD为12.1%。该方法已被用来确定磷化氢是由含有磷化化合物作为掺杂剂的新制造的半导体器件排出的，并且存在于人类来源的排气中。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Determination of phosphine by packed column gas chromatography with alkali flame ionisation detection

A method for the determination of phosphine using packed column isothermal gas chromatography has been developed and validated. The limit of detection is 0.01 ng ml–1 and response is linear over the ranges 0.1–1.0 and 2.5–25 ng ml–1. Reproducibility at 0.1 ng ml–1 was found to be 12.1% RSD. The method has been used to establish that phosphine is outgassed by newly fabricated semi-conductor devices containing phosphide compounds as dopants and is present in flatus of human origin.

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Analytical Communications

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