{"title":"采用表面微加工工艺的三维可移动太赫兹滤波器","authors":"Yu‐Sheng Lin, F. Ma, Chengkuo Lee","doi":"10.1109/OMN.2013.6659113","DOIUrl":null,"url":null,"abstract":"We have demonstrated a MEMS based tunable filter with reconfigurable electric split-ring resonators (eSRR) at THz frequencies. This is accomplished by making planar arrays of eSRR with stress curved beams (eSRR-SCBs) which are actuated out-of-plane by electrostatic force. Our results have demonstrated that the eSRR-SCBs possess blue shifting capabilities and polarization dependent state at THz frequencies, while such adaptive metamaterials offer significant potential in realizing novel electromagnetic functionality with diversified applications such as sensors, switches, and filters.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"84 1","pages":"169-170"},"PeriodicalIF":0.0000,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A 3-D movable THz filter using surface micromachining process\",\"authors\":\"Yu‐Sheng Lin, F. Ma, Chengkuo Lee\",\"doi\":\"10.1109/OMN.2013.6659113\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We have demonstrated a MEMS based tunable filter with reconfigurable electric split-ring resonators (eSRR) at THz frequencies. This is accomplished by making planar arrays of eSRR with stress curved beams (eSRR-SCBs) which are actuated out-of-plane by electrostatic force. Our results have demonstrated that the eSRR-SCBs possess blue shifting capabilities and polarization dependent state at THz frequencies, while such adaptive metamaterials offer significant potential in realizing novel electromagnetic functionality with diversified applications such as sensors, switches, and filters.\",\"PeriodicalId\":6334,\"journal\":{\"name\":\"2013 International Conference on Optical MEMS and Nanophotonics (OMN)\",\"volume\":\"84 1\",\"pages\":\"169-170\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-11-11\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2013 International Conference on Optical MEMS and Nanophotonics (OMN)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMN.2013.6659113\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMN.2013.6659113","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A 3-D movable THz filter using surface micromachining process
We have demonstrated a MEMS based tunable filter with reconfigurable electric split-ring resonators (eSRR) at THz frequencies. This is accomplished by making planar arrays of eSRR with stress curved beams (eSRR-SCBs) which are actuated out-of-plane by electrostatic force. Our results have demonstrated that the eSRR-SCBs possess blue shifting capabilities and polarization dependent state at THz frequencies, while such adaptive metamaterials offer significant potential in realizing novel electromagnetic functionality with diversified applications such as sensors, switches, and filters.
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