基于异质结构的传统折叠级联运算放大器制造优化以提高其元件密度。错配诱导应力和材料孔隙率对工艺过程的影响

International Journal of Online Engineering Pub Date : 2018-04-30 DOI:10.5121/IJOE.2018.7201

P. E.L

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引用次数: 0

摘要

本文介绍了一种提高传统折叠级联码运算放大器结构场效应晶体管密度的方法。在此框架下，我们考虑了在异质结构中制造具有特定构型的逆变器的方法。异质结构的一些需要的区域应该通过扩散或离子注入进行掺杂。然后对掺杂和辐射缺陷采用退火框架优化方案。我们还考虑了一种减小异质结构中错配应力值的方法。本文介绍了一种分析集成电路制造过程中不匹配应力引起的异质结构质量和热量传递的分析方法。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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In this paper we introduce an approach to increase density of field-effect transistors framework a conventional folded-cascode operational amplifier. Framework the approach we consider manufacturing the inverter in heterostructure with specific configuration. Several required areas of the heterostructure should be doped by diffusion or ion implantation. After that dopant and radiation defects should by annealed framework optimized scheme. We also consider an approach to decrease value of mismatch-induced stress in the considered heterostructure. We introduce an analytical approach to analyze mass and heat transport in heterostructures during manufacturing of integrated circuits with account mismatch-induced stress.

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来源期刊

International Journal of Online Engineering COMPUTER SCIENCE, INTERDISCIPLINARY APPLICATIONS-

自引率

0.00%

发文量

审稿时长

12 weeks

期刊介绍： We would like to inform you, that iJOE, the ''International Journal of Online Engineering'' will accept now also papers in the field of Biomedical Engineering and e-Health''. iJOE will therefore be published from January 2019 as the ''International Journal of Online and Biomedical Engineering''. The objective of the journal is to publish and discuss fundamentals, applications and experiences in the fields of Online Engineering (remote engineering, virtual instrumentation and online simulations, etc) and Biomedical Engineering/e-Health. The use of cyber-physical systems, virtual and remote controlled devices and remote laboratories are the directions for advanced teleworking/e-working environments. In general, online engineering is a future trend in engineering and science. Due to the growing complexity of engineering tasks, more and more specialized and expensive equipment as well as software tools and simulators, shortage of highly qualified staff, and the demands of globalization and collaboration activities, it become essential to utilize cyber cloud technologies to maximize the use of engineering resources. Online engineering is the way to address these issues. Considering these, one focus of the International Journal of Online and Biomedical Engineering is to provide a platform to publish fundamentals, applications and experiences in the field of Online Engineering, for example: Remote Engineering Internet of Things Cyber-physical Systems Digital Twins Industry 4.0 Virtual Instrumentation. An important application field of online engineering tools and principles are Biomedical Engineering / e-Health. Topics we are interested to publish are: Automation Technology for Medical Applications Big Data in Medicine Biomedical Devices Biosensors Biosignal Processing Clinical Informatics Computational Neuroscience Computer-Aided Surgery.