喷雾热解法沉积氧化铁薄膜的研究

Sanaa Rafat Yaseen
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引用次数: 0

摘要

六水氯化铁喷雾热解法制备氧化铁薄膜。在空气环境中,在250℃~ 500℃的不同基片温度下,氧化铁膜沉积在清洁良好的玻璃基片上。利用光谱学和扫描电子显微镜研究了氧化铁薄膜的光学和形态特性。原子吸收光谱显示,随着衬底温度的变化,直接带隙能量接近2.18 eV。光学、结构和形态观察表明,在350℃的衬底温度下,薄膜质量越来越好,晶粒尺寸也越来越清晰。
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Deposition of Iron Oxide Thin Films by Spray Pyrolysis Method
The growth and characterization of iron oxide thin films by spray pyrolysis method using iron chloride hexahydrate. Iron oxide films deposited on well cleaned glass substrate at different substrate temperatures varying from 250 0 C to 500 0 C in air atmosphere. The characterization of iron oxides films was investigated for their optical and morphological properties by using spectroscopy and Scanning Electron Microscopy. The atomic absorption spectroscopy showed the existence of direct band gap energy nearly 2.18 eV with varying substrate temperature. Optical, structural and morphological observations were showed the film quality was getting better at 350 0 C substrate temperature, also grain sizes were cleared.
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