Cu CMP浆料和胶体化学

{"title":"Cu CMP浆料和胶体化学","authors":"T. Itakura","doi":"10.4011/SHIKIZAI.81.341","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":21870,"journal":{"name":"Shikizai Kyokaishi","volume":"36 1","pages":"341-347"},"PeriodicalIF":0.0000,"publicationDate":"2008-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Cu CMP Slurry and Colloidal Chemistry\",\"authors\":\"T. Itakura\",\"doi\":\"10.4011/SHIKIZAI.81.341\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":21870,\"journal\":{\"name\":\"Shikizai Kyokaishi\",\"volume\":\"36 1\",\"pages\":\"341-347\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2008-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Shikizai Kyokaishi\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.4011/SHIKIZAI.81.341\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Shikizai Kyokaishi","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.4011/SHIKIZAI.81.341","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}