非平衡磁控溅射制备氮化氧化铌薄膜的低温性能

2017 IEEE 7th International Conference Nanomaterials: Application & Properties (NAP) Pub Date : 2017-09-01 DOI:10.1109/NAP.2017.8190303

S. O. Volkov, L. Odnodvorets

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引用次数: 0

摘要

介绍了纳米超导电性氮化氧化铌的相组成和低温电阻测试结果。采用非平衡磁控溅射法制备了非化学计量氮化氧化铌样品。我们得到的纳米晶薄膜样品在0,3 K附近超导转变范围窄，转变温度在(7,6 - 8,0)K附近。

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Low-temperature properties of niobium oxynitride thin films prepared by non-balanced magnetron sputtering

The results of phase composition, low temperature resistive measurements of nanodimensional superconductive niobium oxynitride are presented. The non-stoichiometry niobium oxynitride samples were fabricated by non-balanced magnetron sputtering. We obtained nanocrystalline thin film samples with narrow range of superconductive transition near 0, 3 K and transition temperature near (7, 6–8, 0)K.

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2017 IEEE 7th International Conference Nanomaterials: Application & Properties (NAP)

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