Y. Yamauchi, A. Higo, K. Kakushima, H. Fujita, H. Toshiyoshi
{"title":"一种光进光出的微镜装置","authors":"Y. Yamauchi, A. Higo, K. Kakushima, H. Fujita, H. Toshiyoshi","doi":"10.1109/SENSOR.2005.1497287","DOIUrl":null,"url":null,"abstract":"In this paper, we report a new concept of optical MEMS (Micro Electro Mechanical System) devices that could be operated by the incident light and to operate yet another light beam; in other words, a light beam is controlled by another light beam through an optical MEMS mirror. A photodiode and an electrostatic micro mirror are integrated into an SOI (silicon-on-insulator) wafer, whose circuit diagram is equivalent to that of a photocoupler. The mechanism can be used for free-space optical computing and optically-addressed fiber optic crossconnect.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"17 1","pages":"1175-1178 Vol. 2"},"PeriodicalIF":0.0000,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"A light-in light-out micro mirror device\",\"authors\":\"Y. Yamauchi, A. Higo, K. Kakushima, H. Fujita, H. Toshiyoshi\",\"doi\":\"10.1109/SENSOR.2005.1497287\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, we report a new concept of optical MEMS (Micro Electro Mechanical System) devices that could be operated by the incident light and to operate yet another light beam; in other words, a light beam is controlled by another light beam through an optical MEMS mirror. A photodiode and an electrostatic micro mirror are integrated into an SOI (silicon-on-insulator) wafer, whose circuit diagram is equivalent to that of a photocoupler. The mechanism can be used for free-space optical computing and optically-addressed fiber optic crossconnect.\",\"PeriodicalId\":22359,\"journal\":{\"name\":\"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.\",\"volume\":\"17 1\",\"pages\":\"1175-1178 Vol. 2\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2005-06-05\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SENSOR.2005.1497287\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SENSOR.2005.1497287","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
In this paper, we report a new concept of optical MEMS (Micro Electro Mechanical System) devices that could be operated by the incident light and to operate yet another light beam; in other words, a light beam is controlled by another light beam through an optical MEMS mirror. A photodiode and an electrostatic micro mirror are integrated into an SOI (silicon-on-insulator) wafer, whose circuit diagram is equivalent to that of a photocoupler. The mechanism can be used for free-space optical computing and optically-addressed fiber optic crossconnect.
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